Infrared and Laser Engineering, Volume. 54, Issue 1, 20240418(2025)
Research on the wide-angle optical lens for MEMS micromirror laser tracking and aiming
Figures & Tables(19)
Fig. 2. (a) Static characterization of the MEMS quasi-static micromirror; (b) Dynamic characterization of the MEMS quasi-static micromirror
Fig. 3. Schematic diagrams of two types of wide-angle optical paths. (a) Galilean wide-angle; (b) Keplerian wide-angle
Fig. 5. (a) Wide-angle lenses optical path diagram; (b) Spot diagram for different incident fields of view; (c) Distortion mesh in 2° incident field of view
Fig. 7. (a) Beam deflection before angle expansion; (b) Beam deflection after angle expansion
Fig. 8. Experimental setup for testing wide-angle linearity. (a) Before angle expansion; (b) After angle expansion
Fig. 9. Experimental setup for laser scanning wide-angle verification. (a) Before angle expansion; (b) After angle expansion
Fig. 10. Intensity distribution after laser collimation. (a) Two-dimensional light intensity distribution; (b) One-dimensional light intensity distribution and Gaussian fitting
Fig. 11. Intensity distribution of the laser light after the wide-angle lens. (a) Two-dimensional light intensity distribution; (b) One-dimensional light intensity distribution and Gaussian fitting
Fig. 12. Schematic diagram of deflection angle calculation. (a) Before angle expansion; (b) After angle expansion
Fig. 14. Experimental characterization results of angle spreading linearity
Fig. 15. Demonstration of the wide-angle lenses. (a) Laser spot before angle expansion; (b) Laser spot after angle expansion; (c) Line-scan pattern before angle expansion; (d) Line-scan pattern after angle expansion; (e) Lissajous scanning pattern before angle expansion; (f) Lissajous scanning pattern after angle expansion
Table 1. Performance of MEMS quasi-static micromirror
View tableView in ArticleTable 1. Performance of MEMS quasi-static micromirror
Scanning axis X Y Sensitivity deg/V 0.02299 0.024441 Linearity 0.0944 %0.0026 %Resonance frequency/Hz 1006.875 1010.313 Quality factor 1074.570 808.250 Damping ratio 0.0465 %0.0619 %
Table 2. Simulation results of different wide-angle lenses
View tableView in ArticleTable 2. Simulation results of different wide-angle lenses
Wide-angle lenses type RMS radius @1 m Maximum distortion @ 2° PCX + PCV 1175.79 μm10.9361 %PCX + BCV 702.131 μm 11.9758 %BCX + BCV 890.972 μm 4.5305 %BCX + PCV×2 648.614 μm 4.0636 %BCX + BCV×2 563.059 μm 2.4995 %
Table 3. Zemax design parameters of wide-angle lenses
View tableView in ArticleTable 3. Zemax design parameters of wide-angle lenses
Surface number Radius of curvature/ mm Thickness/ mm Material Diameter/ mm Mechanical diameter/ mm 1 30.5615 2.0000 N-BK7 6.35 7.00 2 30.5615 17.0117 6.35 7.00 3 − 22.5174 2.0000 N-BK7 13.20 14.00 4 22.5174 2.0000 13.20 14.00 5 − 22.5174 2.0000 N-BK7 13.20 14.00 6 22.5174 0.0000 13.20 14.00
Table 4. Laser beam quality analysis results before and after angle expansion
View tableView in ArticleTable 4. Laser beam quality analysis results before and after angle expansion
Test direction Before angle expansion After angle expansion X Y X Y Spot diameter/μm 2054.5 2054.7 696.84 696.72 SSE 0.5606 0.5806 0.7455 0.8851 RMS 0.0137 0.0139 0.0158 0.0172 R2 0.9984 0.9983 0.9964 0.9959 Full angle divergence/mrad 0.624 0.621 1.750 1.904
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Pengcheng ZHANG, Yang WANG, Anna LI, Hao HUANG, Cheng ZHANG, Jiachang ZHANG, Yonggui ZHANG, Lihao WANG, Yichen LIU, Zhenyu WU. Research on the wide-angle optical lens for MEMS micromirror laser tracking and aiming[J]. Infrared and Laser Engineering, 2025, 54(1): 20240418
Paper Information
Category: 激光器与激光光学
Received: Sep. 18, 2024
Accepted: --
Published Online: Feb. 12, 2025
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