Researching | Application of Silicon-Based Microring Resonant Cavity in Integrated Optical Gyroscope Sensitive Unit

Laser & Optoelectronics Progress, Volume. 59, Issue 13, 1313001(2022)

Application of Silicon-Based Microring Resonant Cavity in Integrated Optical Gyroscope Sensitive Unit

Daoxin Sun¹, Dongliang Zhang^1、*, Fu Bi¹, Lidan Lu¹, Zhehai Zhou², and Lianqing Zhu¹

Author Affiliations

¹Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, School of Instrument Science and Opto-Electronics Engineering, Beijing Information Science & Technology University, Beijing 100192, China

²Beijing Laboratory of Optical Fiber Sensing and System, School of Instrument Science and Opto-Electronics Engineering, Beijing Information Science & Technology University, Beijing 100016, China

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Figures&Tables (17)

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Figures & Tables(17)

Fig. 1. Dual microring resonator structure based on SOI

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Fig. 2. Light field distribution of waveguides of different widths.(a) W=0.4 $μ m$ ,TE₀; (b) W=0.5 $μ m$ ,TE₀; (c) W=0.6 $μ m$ ,TE₀; (d) W=0.7 $μ m$ ,TE₀; (e) W=0.7 $μ m$ ,TE₁; (f) W=0.8 $μ m$ ,TE₀; (g) W=0.8 $μ m$ ,TE₁; (h) W=1.2 $μ m$ ,TE₀; (i) W=1.2 $μ m$ ,TE₁

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Fig. 3. Simulation diagram of the coupled structure

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Fig. 4. Relationship between coupling coefficient, transmission coefficient and coupling length

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Fig. 5. Simulation diagram of dual microring link

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Fig. 6. Relationship between resonance spectrum andcoupling coefficient

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Fig. 7. Relationship between quality factor and coupling coefficient under different transmission loss

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Fig. 8. Spectral wavelength near 1550 nm

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Fig. 9. Resonance curve of resonator with different transmission loss

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Fig. 10. Picture of the dual microring resonator chip and layout of key devices

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Fig. 11. Chip test module

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Fig. 12. Schematic diagram of the waveguide coupling test platform

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Fig. 13. Spectral ratio test fitting of the beam splitter

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Fig. 14. Loss of the grating coupling structure

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Fig. 15. Test spectrogram of dual microring resonator

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Table 1. Structural parameters of the microring resonator
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Table 1. Structural parameters of the microring resonator
Parameter Value Parameter Value
$W / μ m$ 0.5 $W_{r}$ $/ μ m$ 1.2
H $/ μ m$ 0.22 r $/ μ m$ 500
d $/ μ m$ 0.2 L_c $/ μ m$ 3360
L $/ μ m$ 10 Transmission loss /（dB·cm^-1） 2

Table 2. Test results and simulation results
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Table 2. Test results and simulation results
Category k FSR /nm FWHM（3 dB）/nm F Q /10⁴
Simulation 0.3 0.155 0.020 7.75 7.75
Experimentation 0.3 0.182 0.045 4.04 3.40

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Daoxin Sun, Dongliang Zhang, Fu Bi, Lidan Lu, Zhehai Zhou, Lianqing Zhu. Application of Silicon-Based Microring Resonant Cavity in Integrated Optical Gyroscope Sensitive Unit[J]. Laser & Optoelectronics Progress, 2022, 59(13): 1313001

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Paper Information

Category: Integrated Optics

Received: Jul. 23, 2021

Accepted: Aug. 27, 2021

Published Online: Jun. 9, 2022

The Author Email: Zhang Dongliang (zdl_photonics@bistu.edu.cn)

DOI:10.3788/LOP202259.1313001

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology