Laser & Optoelectronics Progress, Volume. 59, Issue 13, 1313001(2022)
Application of Silicon-Based Microring Resonant Cavity in Integrated Optical Gyroscope Sensitive Unit
As an optically sensitive unit, the silicon-based integrated photonic resonator plays a vital role in the performance of chip-scale optical gyroscopes. In this paper, the integrated resonator of the photonic integrated gyroscope with the enhanced reciprocity-sensitive dual micro-ring architecture is the research object. The key structural parameters of the dual microring resonator are analyzed through finite-difference time-domain simulation. Constructing a simulation link allowed the study on the internal relationships between quality factor, fineness, coupling coefficient, and transmission loss. The resulting insights formed the basis for structural layout design. The dual microring resonant cavity device is then fabricated through a multiproject wafer tape-out using a passive silicon-based photonic integration process. Test results show that, for a microring radius of 500
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Daoxin Sun, Dongliang Zhang, Fu Bi, Lidan Lu, Zhehai Zhou, Lianqing Zhu. Application of Silicon-Based Microring Resonant Cavity in Integrated Optical Gyroscope Sensitive Unit[J]. Laser & Optoelectronics Progress, 2022, 59(13): 1313001
Category: Integrated Optics
Received: Jul. 23, 2021
Accepted: Aug. 27, 2021
Published Online: Jun. 9, 2022
The Author Email: Zhang Dongliang (zdl_photonics@bistu.edu.cn)