Laser & Optoelectronics Progress, Volume. 59, Issue 13, 1313001(2022)

Application of Silicon-Based Microring Resonant Cavity in Integrated Optical Gyroscope Sensitive Unit

Daoxin Sun1, Dongliang Zhang1、*, Fu Bi1, Lidan Lu1, Zhehai Zhou2, and Lianqing Zhu1
Author Affiliations
  • 1Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, School of Instrument Science and Opto-Electronics Engineering, Beijing Information Science & Technology University, Beijing 100192, China
  • 2Beijing Laboratory of Optical Fiber Sensing and System, School of Instrument Science and Opto-Electronics Engineering, Beijing Information Science & Technology University, Beijing 100016, China
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    As an optically sensitive unit, the silicon-based integrated photonic resonator plays a vital role in the performance of chip-scale optical gyroscopes. In this paper, the integrated resonator of the photonic integrated gyroscope with the enhanced reciprocity-sensitive dual micro-ring architecture is the research object. The key structural parameters of the dual microring resonator are analyzed through finite-difference time-domain simulation. Constructing a simulation link allowed the study on the internal relationships between quality factor, fineness, coupling coefficient, and transmission loss. The resulting insights formed the basis for structural layout design. The dual microring resonant cavity device is then fabricated through a multiproject wafer tape-out using a passive silicon-based photonic integration process. Test results show that, for a microring radius of 500 μm, the coupling coefficient between waveguide and microring is 0.3, the working wavelength is around 1550 nm, the free spectral range is 0.182 nm, the 3 dB bandwidth is 0.045 nm, the fineness is 4.04, and the quality factor is ~3.4×104. These research results provide a firm foundation for further design optimization of the dual microring resonator.

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    Daoxin Sun, Dongliang Zhang, Fu Bi, Lidan Lu, Zhehai Zhou, Lianqing Zhu. Application of Silicon-Based Microring Resonant Cavity in Integrated Optical Gyroscope Sensitive Unit[J]. Laser & Optoelectronics Progress, 2022, 59(13): 1313001

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    Paper Information

    Category: Integrated Optics

    Received: Jul. 23, 2021

    Accepted: Aug. 27, 2021

    Published Online: Jun. 9, 2022

    The Author Email: Zhang Dongliang (zdl_photonics@bistu.edu.cn)

    DOI:10.3788/LOP202259.1313001

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