Fig. 1. Geometry of the electronegative magnetized plasma sheath model.电负性等离子体磁鞘模型示意图

Fig. 2. The effects of negative ions concentration and temperature on the lower limit of ion Mach number ( , , , , ): (a) Boltzmannian model; (b) reflection model. 负离子浓度和温度对离子马赫数下限的影响( , , , , )　(a)玻尔兹曼模型; (b)反射模型

Fig. 3. The effect of wall potential on the lower limit of ion Mach number: (a) Whole; (b) part ( , , , ). 基板电势对离子马赫数下限的影响　(a)整体; (b)局部 ( , , , )

Fig. 4. The effect of the sheath edge electric field on the lower limit of ion Mach number ( , , , , , ). 鞘边电场对离子马赫数下限的影响( , , , , , )

Fig. 5. The effect of collision parameter on the lower limit of ion Mach number ( , , , , , ). 碰撞参数对离子马赫数下限的影响( , , , , , )

Fig. 6. The effect of magnetic field angle on the lower limit of ion Mach number ( , , , , , ). 磁场角度对离子马赫数下限的影响( , , , , , )

Fig. 7. The normalized charged particle density ( ). 鞘层中带电粒子密度分布( )

Fig. 8. The normalized charged particle density ( ). 鞘层中带电粒子密度分布( )