[1] [1] LIU H X, ZHANG W, GONG Y．Progress in grating parameter measurement technology［J］．Chinese Optics, 2011, 4(2): 103-110．(in Chinese)

[2] [2] LI X T, YU H L, QI X D, et al..Progress in grating parameter measurement technology［J］．Chinese Jounal of Lasers, 2014, 4(2): 103-110．(in Chinese)

[3] [3] ZHANG B Q, SHI G Q, SHI G F, et al.. Pre-control of mechanical scratching diffractive grating［J］. Opt. Precision Eng., 2013, 21(7): 1666-1675．(in Chinese)

[4] [4] JIANG W W, GAO Y G, FENG D Y, et al.. Automatic-leveling system for base-plane of large-size photoelectric equipment ［J］ . Opt. Precision Eng., 2009, 17(5): 1039-1044．(in Chinese)

[5] [5] CHENG Y L, WANG X W, PAN G F, et al.. Coupling leveling controller design of electro-hydraulic multi-axis synchronous loading for hydraulic support test rig［J］. Journal of China Coal Society, 2011, 36(10): 1762-1767．(in Chinese)

[6] [6] GUO H N, CAO J ZH, ZHOU Z F, et al.. Auto-focus algorithm of digital camera based on optical flow estimation ［J］. Infrared and Laser Engineering, 2013, 42(12): 1039-1045．(in Chinese)

[7] [7] NIE K, LIU W Y, WANG J J. Image definition evaluation method of ICF micro-target assembly ［J］. Chinese Journal of Luminescence, 2014, 35(12): 1506-1510．(in Chinese)

[8] [8] ZHU K F, JIANG W, WANG D F, et al.. New Kind of clarity-evaluation-function of image ［J］. Infrared and Laser Engineering, 2005, 34(4): 464-468．(in Chinese)

[9] [9] ZHANG Y CH, ZHAO J, HAN X ZH, et al.. Application of SUSAN definition evaluation function in auto-focusing ［J］. Chinese Optics, 2014, 7(2): 240-244．(in Chinese)

[10] [10] HONG Y ZH, REN G Q, SUN J. Analysis and improvement on sharpness evaluation function of defocused image ［J］. Opt. Precision Eng., 2014, 22(12): 3401-3408．(in Chinese)

[11] [11] CHEN SH, MENG Y H, JIN G. Study on the autofocus evaluation function in ellipsometric image system ［J］.Acta Optica Sinica, 2005, 25(7): 923-929．(in Chinese)

[12] [12] ZHANG T Y, FENG H J, XU ZH H, et al.. Sharpness metric based on histogram of strong edge width［J］. Journal of Zhejiang University(Engineering Science), 2014, 48(2): 312-320．(in Chinese)

[13] [13] SUN J, YUAN Y H, WANG C Y. Comparison and Analysis of Algorithms for Digital Image Processing in Autofocusing Criterion［J］.Acta Optica Sinica, 2007, 27(1): 35-39．(in Chinese)

[14] [14] GUO H N, CAO J ZH, ZHOU Z F, et al.. Image definition evaluation algorithm based on color relativity ［J］. Infrared and Laser Engineering, 2013, 42(11): 3132-3136．(in Chinese)