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Laser & Optoelectronics Progress, Volume. 54, Issue 6, 61401(2017)

Thermal Effect Simulation Analysis on Excimer Laser Annealing of Zinc Oxide Thin Films

Shao Jingzhen1、*, Wang Xi2, Hu Hongtao1, and Fang Xiaodong1
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    Article index updated:May. 20, 2024

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    Shao Jingzhen, Wang Xi, Hu Hongtao, Fang Xiaodong. Thermal Effect Simulation Analysis on Excimer Laser Annealing of Zinc Oxide Thin Films[J]. Laser & Optoelectronics Progress, 2017, 54(6): 61401

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Jan. 17, 2017

    Accepted: --

    Published Online: Jun. 8, 2017

    The Author Email: Jingzhen Shao (jzshao@aiofm.ac.cn)

    DOI:10.3788/lop54.061401

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology