[1] [1] AMANTEA R,KNOEDLER C M,PANTUSO F P,et al.An uncooled IR imaging with 5mk NEDT[C]//Proceedings of SPIE,Infrared Technology and Applications ⅩⅩⅢ,1997,3061:210-222.

[2] [2] ZHAO yang,MAO Ming -yao,HOROWETZ R,et al.Optomechanical uncooled infrared imaging system:desing,micro-fabrication,and performance[J].IEEE,2002,11:136-146.

[3] [3] AMANTEA R,GOODMAN L A,PANTUSO F,et al.Progress towards an uncooled IR imager with 5 mK NEDT[C]//Proceedings of SPIE,Infrared Technology and ApplicationsⅩⅩⅣ,1998,3436:647-659.

[5] [5] DATSKOS P G,RSJIC S,SENESAC L R,et al.Fabrication of quantum well micro-cantilever photon detectors[J].Ultramicroscopy,2001,86:191-206.

[6] [6] PASSIAN A,WIG A,MERIAUDEAU F,et al.Knudsen forces on microcantilevers[J].Journal of Applied Physics,2002,92(10):6326-6333.