Acta Photonica Sinica, Volume. 47, Issue 9, 905001(2018)
Usage of Additive for the Improvement of the Filling Effect during Filling the Grating Structure of the Nanoimprint Stamp
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ZHENG Yong-guang, ZHANG Ran, LIU Ze, CHU Jin-kui. Usage of Additive for the Improvement of the Filling Effect during Filling the Grating Structure of the Nanoimprint Stamp[J]. Acta Photonica Sinica, 2018, 47(9): 905001
Paper Information
Received: Mar. 29, 2018
Accepted: --
Published Online: Sep. 15, 2018
The Author Email: Yong-guang ZHENG (zhengyongguang@mail.dlut.edu.cn)
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