Optics and Precision Engineering, Volume. 13, Issue 3, 305(2005)

[in Chinese]

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    References(8)

    [1] [1] LIU Y T,FUNG R F, HUANG T K. Dynamic response of a precision positioning table impacted by a soft-mounted piezoelectric actuator[J]. Precision Engineering, 2004,28(3): 252-260.

    [2] [2] TENZER P E,MRAD R B. On amplification in inchworm precision positioners[J]. Mechatronics, 2004,14:515-531.

    [3] [3] KIM S C,KIM S H. Precise rotary actuator by inchworm motion using dual wrap belts[J]. Review of Science Instruments, 1999,70(5): 2546-2550.

    [4] [4] AWABDY B A, AHIH W C, AUSLANDER D M. Nanometer positioning of a linear motion stage under static loads[J]. IEEE Trans Mechantronics, 1998,3(2):113-119.

    [5] [5] SHIM J Y,GWEON D G. Piezo-driven metrological multiaxis nanopositioner[J]. Review of Science Instruments,2001,72 (11): 4183-4187.

    [8] [8] ZHANG B, ZHU Z. Developing a linear piezomotor with nanometer resolution and high stiffness[J]. IEEE/ASME Trans Mechatron, 1997,2(1): 22-29.

    [9] [9] GAO P,SWEI SH M,YUAN ZH. A new piezodrived precision micropositioning stage utilizing flexure hinges[J]. Nanotechnology, 1999,10: 394-398.

    [10] [10] SHAMOTO E, MORIWAKI T. Development of a "walking drive"ultraprecision positioner[J].Precision Engineering, 1997, 20(2): 85-92.

    CLP Journals

    [1] ZHAO Hong-wei, YANG Bai-hao, ZHAO Hong-jian, HUANG Hu. Test of nanomechanical properties of single crystal silicon[J]. Optics and Precision Engineering, 2009, 17(7): 1602

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    Paper Information

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    Received: Mar. 22, 2005

    Accepted: --

    Published Online: Nov. 3, 2006

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