Process Optimization for Cylindrical Single-Crystal Silicon Mirror with a Tilted Incident Ion Beam Figuring

Ci Song; Ye Tian; Feng Shi; Kun Zhang; Yongxiang Shen

doi:10.3788/AOS202040.1222001

Acta Optica Sinica, Volume. 40, Issue 12, 1222001(2020)

Process Optimization for Cylindrical Single-Crystal Silicon Mirror with a Tilted Incident Ion Beam Figuring

Ci Song^1,2,3、*, Ye Tian^1,2,3, Feng Shi^1,2,3, Kun Zhang^1,2,3, and Yongxiang Shen^1,2,3

¹College of Intelligent Science and Technology, National University of Defense Technology, Changsha, Hunan 410073, China

²Hunan Provincial Key Laboratory of Ultra-Precision Machining Technology, Changsha, Hunan 410073 China

³Laboratory of Science and Technology on Integrated Logistics Support, Changsha, Hunan 410073, China

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Ci Song, Ye Tian, Feng Shi, Kun Zhang, Yongxiang Shen. Process Optimization for Cylindrical Single-Crystal Silicon Mirror with a Tilted Incident Ion Beam Figuring[J]. Acta Optica Sinica, 2020, 40(12): 1222001

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Paper Information

Category: Optical Design and Fabrication

Received: Mar. 10, 2020

Accepted: Mar. 24, 2020

Published Online: Jun. 3, 2020

The Author Email: Song Ci (songci@nudt.edu.cn)

DOI:10.3788/AOS202040.1222001

Topics

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