Acta Optica Sinica, Volume. 40, Issue 12, 1222001(2020)

Process Optimization for Cylindrical Single-Crystal Silicon Mirror with a Tilted Incident Ion Beam Figuring

Ci Song1,2,3、*, Ye Tian1,2,3, Feng Shi1,2,3, Kun Zhang1,2,3, and Yongxiang Shen1,2,3
Author Affiliations
  • 1College of Intelligent Science and Technology, National University of Defense Technology, Changsha, Hunan 410073, China
  • 2Hunan Provincial Key Laboratory of Ultra-Precision Machining Technology, Changsha, Hunan 410073 China
  • 3Laboratory of Science and Technology on Integrated Logistics Support, Changsha, Hunan 410073, China
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    Ci Song, Ye Tian, Feng Shi, Kun Zhang, Yongxiang Shen. Process Optimization for Cylindrical Single-Crystal Silicon Mirror with a Tilted Incident Ion Beam Figuring[J]. Acta Optica Sinica, 2020, 40(12): 1222001

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Mar. 10, 2020

    Accepted: Mar. 24, 2020

    Published Online: Jun. 3, 2020

    The Author Email: Song Ci (songci@nudt.edu.cn)

    DOI:10.3788/AOS202040.1222001

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