Wide-Range and High-Precision Microscopic Focusing System for Laser-Induced Breakdown Spectroscopy

Zhangwei Jiang; Yan Yan; Yang Li; Yunfeng Bi

doi:10.3788/AOS201838.1215004

Acta Optica Sinica, Volume. 38, Issue 12, 1215004(2018)

Wide-Range and High-Precision Microscopic Focusing System for Laser-Induced Breakdown Spectroscopy

Zhangwei Jiang^1,2、*, Yan Yan³, Yang Li^1,2, and Yunfeng Bi^1,2、*

¹ School of Mechanical, Electrical & Information Engineering, Shandong University (Weihai), Weihai, Shandong 264200, China;

² Fuel Gas Detection Institute of Shandong University, Weihai, Shandong 264200, China

³ Brilliance Auto R & D Center, Shenyang, Liaoning 110000, China;

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Figures & Tables(9)

Fig. 1. Diagram of automatic microscopic focusing system for LIBS detection

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Fig. 2. Imaging of two defocus states

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Fig. 3. Incomplete spot imaging

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Fig. 4. Complete spot imaging

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Fig. 5. Light intensity distribution maps

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Fig. 6. Relationship between the defocus distance and the two-color spot center distance

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Fig. 7. Physical imaging maps

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Table 1. Relationship between the defocus distance and the two-color spot center distance

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Table 1. Relationship between the defocus distance and the two-color spot center distance

Defocus distance /μm	Pixel distance /pixel	Defocus distance /μm	Pixel distance /pixel	Defocus distance /μm	Pixel distance /pixel
475	1407.5000	150	223.3752	-175	190.0569
450	1327.5000	125	82.5207	-200	393.7493
425	1254.2000	100	27.3013	-225	533.0809
400	1175.4000	75	12.0203	-250	661.4308
375	1101.7000	50	8.6250	-275	746.3239
350	1026.5000	25	3.7311	-300	817.1268
325	980.3187	0	2.0381	-325	887.7337
300	917.3111	-25	5.3427	-350	944.5840
275	885.0653	-50	15.9099	-375	1015.5000
250	804.9607	-75	67.5093	-400	1114.6000
225	715.3268	-100	128.8011	-425	1277.4000
200	589.5747	-125	149.4676	-450	1401.8000
175	412.7080	-150	175.3470	-475	1468.8000

Table 2. Standard deviation of image pixel brightness

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Table 2. Standard deviation of image pixel brightness

Defocus distance /μm	Horizontal STD	Vertical STD	Defocus distance /μm	Horizontal STD	Vertical STD
-80	9.1247	10.5315	20	13.7186	15.4348
-60	12.3589	13.5396	40	12.6334	13.3821
-40	13.5678	16.0603	60	10.7733	11.4970
-20	13.1859	16.3127	80	7.6790	7.4425
0	14.2103	18.3880	100	6.1405	4.9038

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Zhangwei Jiang, Yan Yan, Yang Li, Yunfeng Bi. Wide-Range and High-Precision Microscopic Focusing System for Laser-Induced Breakdown Spectroscopy[J]. Acta Optica Sinica, 2018, 38(12): 1215004

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Paper Information

Category: Machine Vision

Received: Jun. 5, 2018

Accepted: Jul. 25, 2018

Published Online: May. 10, 2019

The Author Email:

DOI:10.3788/AOS201838.1215004

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology