Optical Instruments, Volume. 45, Issue 4, 9(2023)
Research on Terahertz near-field optical subsurface detection technology
This paper investigated the microscopic imaging and detection of subsurface metal micro/nano structures using Terahertz scattering-type near-field optical microscopy (THz s-SNOM). For the first time, a self-built THz s-SNOM system was employed to measure the Terahertz near-field of gold micro wires covered with hexagonal boron nitride (h-BN) film on the surface, resulting in near-field microscopy images with nanometer-level spatial resolution and high contrast. Combined with full-wave numerical simulation, the spatial resolution, near-field scattering signal intensity, and imaging contrast of THz s-SNOM for detecting subsurface metal micro/nano structures were analyzed. The study shows that THz s-SNOM has excellent subsurface microscopic imaging and detection capabilities and can be applied to the subsurface structure characterization and defect detection of micro/nano electronic devices.
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Haiquan TONG, Guanjun YOU. Research on Terahertz near-field optical subsurface detection technology[J]. Optical Instruments, 2023, 45(4): 9
Category: TESTING TECHNOLOGY
Received: Feb. 2, 2023
Accepted: Feb. 20, 2023
Published Online: Sep. 26, 2023
The Author Email: YOU Guanjun (youguanjun@126.com)