Optics and Precision Engineering, Volume. 15, Issue 10, 1474(2007)

Calcium fluoride crystal growth with multi-hole-crucible

[in Chinese]1...2, [in Chinese]3 and [in Chinese]1 |Show fewer author(s)
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    References(3)

    [1] [1] WESTERHOFF T,KNAPP K,MOERSEN E,et al..Optical materials for microlithography application[J].SPIE,1998,3424:10-19.

    [2] [2] SENGUTTUVAN N,AOSHIMA M,SUMIYA K,et al..Oriented growth of large size calcium fluoride single crystals for optical lithography[J].Journal of Crystal Growth,2005,280:462-466.

    [5] [5] MOLCHANOV A,FRIEDRICH J,WEHRHAN G,et al..Study of the oxygen incorporation during growth of large CaF2-crystal[J].Journal of Crystal Growth,2005,273:629-637.

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    [in Chinese], [in Chinese], [in Chinese]. Calcium fluoride crystal growth with multi-hole-crucible[J]. Optics and Precision Engineering, 2007, 15(10): 1474

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    Received: Apr. 13, 2007

    Accepted: --

    Published Online: Feb. 18, 2008

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