Acta Optica Sinica (Online), Volume. 2, Issue 2, 0209001(2025)

Research Progress on In-Situ Characterization Technology of Laser Micro-Nano Fabrication (Invited)

Zhiyong Tan1, Jielei Ni1, Qianyi Wei1, Jiahui Pan1, Yuquan Zhang1, Ke Zhang1, Xiaocong Yuan1,2, and Changjun Min1、*
Author Affiliations
  • 1Nanophotonics Research Centre, Institute of Microscale Optoelectronics & State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, Shenzhen 518060, Guangdong , China
  • 2Research Center for Frontier Fundamental Studies, Zhejiang Lab , Hangzhou 311100, Zhejiang , China
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    [40] Zhang X L, Jiang J, Lai C H et al. Self‐calibration Raman enhancement characteristics of silver nanoparticles/carbon nanotubes composite structure[J]. Chinese Journal of Lasers, 51, 1911001(2024).

    [43] Fu X, Xie Z G, Zhang H J et al. A novel electrochemical atomic force microscope and its applications[J]. Chinese Journal of Lasers, 35, 147-150(2008).

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    Zhiyong Tan, Jielei Ni, Qianyi Wei, Jiahui Pan, Yuquan Zhang, Ke Zhang, Xiaocong Yuan, Changjun Min. Research Progress on In-Situ Characterization Technology of Laser Micro-Nano Fabrication (Invited)[J]. Acta Optica Sinica (Online), 2025, 2(2): 0209001

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    Paper Information

    Category: Research Articles

    Received: Oct. 15, 2024

    Accepted: Nov. 28, 2024

    Published Online: Feb. 11, 2025

    The Author Email: Min Changjun (cjmin@szu.edu.cn)

    DOI:10.3788/AOSOL240459

    CSTR:32394.14.AOSOL240459

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