Acta Optica Sinica (Online), Volume. 2, Issue 2, 0209001(2025)

Research Progress on In-Situ Characterization Technology of Laser Micro-Nano Fabrication (Invited)

Zhiyong Tan1, Jielei Ni1, Qianyi Wei1, Jiahui Pan1, Yuquan Zhang1, Ke Zhang1, Xiaocong Yuan1,2, and Changjun Min1、*
Author Affiliations
  • 1Nanophotonics Research Centre, Institute of Microscale Optoelectronics & State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, Shenzhen 518060, Guangdong , China
  • 2Research Center for Frontier Fundamental Studies, Zhejiang Lab , Hangzhou 311100, Zhejiang , China
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    In recent years, with the widespread application of laser processing technology in micro-nano scale materials and devices, research into characterization techniques for laser processing has played a crucial role in understanding laser-material interactions, optimizing the processing process, and improving processing quality. These techniques have found broad applications in fields such as micro-nano optoelectronic device fabrication and biomedical material processing. However, as processing precision improves and application areas expand, performing in-situ rapid and real-time characterization of laser-processed micro-nano structures has become a key technical challenge. We introduce the major in-situ characterization techniques currently used in laser micro-nano processing, classifying them into two categories: geometric in-situ characterization and ultra-high spatiotemporal resolution in-situ characterization. Geometric in-situ characterization, including techniques such as scanning electron microscopy (SEM) and structured light three-dimensional imaging, is widely employed for high-resolution imaging of surface morphology, enabling rapid in-situ characterization of laser-processed micro-nano structures. Ultra-high spatiotemporal resolution in-situ characterization techniques, such as pump?probe imaging and single-pulse ultrafast imaging, allow observation of the transient evolution of materials during laser processing with picosecond to femtosecond temporal resolution. These techniques reveal changes in microstructure and material properties, providing crucial insights into the interaction between lasers and materials. Finally, we summarize the findings and present an outlook on the future development of in-situ characterization technologies for laser processing.

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    Zhiyong Tan, Jielei Ni, Qianyi Wei, Jiahui Pan, Yuquan Zhang, Ke Zhang, Xiaocong Yuan, Changjun Min. Research Progress on In-Situ Characterization Technology of Laser Micro-Nano Fabrication (Invited)[J]. Acta Optica Sinica (Online), 2025, 2(2): 0209001

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    Paper Information

    Category: Research Articles

    Received: Oct. 15, 2024

    Accepted: Nov. 28, 2024

    Published Online: Feb. 11, 2025

    The Author Email: Min Changjun (cjmin@szu.edu.cn)

    DOI:10.3788/AOSOL240459

    CSTR:32394.14.AOSOL240459

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