Removal function of computer controlled polishing SiC mirror with fixed abrasive

WANG Xu; ZHANG Feng; ZHANG Xue-jun

Optics and Precision Engineering, Volume. 17, Issue 5, 951(2009)

WANG Xu1...2,*, ZHANG Feng1 and ZHANG Xue-jun1 |Show fewer author(s)

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¹[in Chinese]

²[in Chinese]

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References(5)

[1] [1] ZHAO Y W,CHANG L.A micro-contact and wear model for chemical-mechanical polishing of silicon wafers[J] .Wear, 2002,252:220-226.

[2] [2] BROWN N J.Optical Fabrication[M].Lawrence Livermore National Laboratory,1987:6- 7.

[3] [3] WANG Q D, YU J CH, ZHANG F, et al..Polishing performance comparison of small polishing pad worked in different motion model in computer controlled optical polishing[J]. Opt.Precision Eng., 1999,7(5):73-79.(in Chinese)

[4] [4] ZHENG W M, CAO T N, ZHANG X Z. Applications of a novel general removal function model in the CCOS[J].SPIE,2000,4231:51-58.

[5] [5] WANG Y, YU J CH. Studying and optimizing running mode and parameter of polishing tool used in computer controlled polishing of optical surface[J].Optical Technique, 2003,29(3):258-265

CLP Journals

[1] WANG Yong-gang, CUI Tian-gang, MA Wen-sheng, CHEN Bin, CHEN Bo. Fabrication of Wolter-I grazing mirror[J]. Optics and Precision Engineering, 2011, 19(4): 743

[2] WANG Yong-gang, CUI Tian-gang, MA Wen-sheng, CHEN Bin, CHEN Bo. Removal function for fabrication of WolterⅠgrazing mirror by elastic ball tool[J]. Optics and Precision Engineering, 2011, 19(1): 10

[3] WANG Xu. Fabrication of SiC mirror in full aperture with optimized fixed abrasive polishing pad[J]. Optics and Precision Engineering, 2012, 20(10): 2123

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WANG Xu, ZHANG Feng, ZHANG Xue-jun. Removal function of computer controlled polishing SiC mirror with fixed abrasive[J]. Optics and Precision Engineering, 2009, 17(5): 951

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