A new computer controlled polishing technology called the fixed abrasive machining technology is described in this paper,and a removal function model for multi-pellet polishing pads is established based on the removal function theory of plane motion .The parameters of the model,motion deflection distance of the polishing pad and the distance between pellets and pellets are optimized by a approaching factor and a curve rms distance to use in experiments. The comparison of the theoretical model and the experimental results show that the error between the theoretical maximum removal rate and the experiment data is 0.007 3 μm/min, and its deflection ratio is 5.58% . The rms distance warp between the theoretical removal function curve and the experimental curve is 0.084 9 μm and its deflection ratio is 7.01%. The veracity of the theoretical model is verified by experimental results, which can predict the feasibility of the fixed abrasive polishing technology and can lay a foreground for the SiC mirror precision fabrication field.