Acta Photonica Sinica, Volume. 32, Issue 6, 653(2003)
Fabrication of Submicron Elements by Ion Beam Etching
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of Submicron Elements by Ion Beam Etching[J]. Acta Photonica Sinica, 2003, 32(6): 653