Optics and Precision Engineering, Volume. 10, Issue 6, 626(2002)

Study of the technology of modeling and simulation of MEMS

[in Chinese] and [in Chinese]
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    References(18)

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    [in Chinese], [in Chinese]. Study of the technology of modeling and simulation of MEMS[J]. Optics and Precision Engineering, 2002, 10(6): 626

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    Paper Information

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    Received: Aug. 17, 2002

    Accepted: --

    Published Online: Sep. 18, 2007

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