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Acta Optica Sinica, Volume. 32, Issue 10, 1031002(2012)

Design and Fabrication of the Multilayer Film of Enhancing Spectral-Purity in Extreme Ultraviolet

Zhu Wenxiu1,2、*, Jin Chunshui1, Kuang Shangqi1, and Yu Bo1
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    Zhu Wenxiu, Jin Chunshui, Kuang Shangqi, Yu Bo. Design and Fabrication of the Multilayer Film of Enhancing Spectral-Purity in Extreme Ultraviolet[J]. Acta Optica Sinica, 2012, 32(10): 1031002

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    Paper Information

    Category: Thin Films

    Received: Apr. 25, 2012

    Accepted: --

    Published Online: Jul. 17, 2012

    The Author Email: Wenxiu Zhu (zhuwenxiu311@126.com)

    DOI:10.3788/aos201232.1031002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology