Fig. 1. (a) Sketch-map of the FODI. (b) An optic in IOM and an example of LID inside (196 µm). (c) The FODI image of the optics and the LID corresponding to (b).

Fig. 2. Sketch-map of the online optics damage inspection by using TIR illumination and remote imaging method. Edge illumination lights are the only optic to be imaged.

Fig. 3. Semiconductor laser light source (wavelength is 808 nm).

Fig. 4. Edge illumination is uneven. An initiated LID is difficult to detect or accurately segment to judge whether they have grown up. (a) Online image. (b) Uneven lighting simulation.

Fig. 5. Sketch-map of the SR and adaptive segmentation method.

Fig. 6. Examples showing only backlit illumination of the 12 classes in the “Damage Morphology” dataset^[15].

Fig. 7. Cross section of the isolated peak and cross section of the peak super-imposed on a background feature, both shown with cross hatching to indicate the total area included when a fixed k is used to define the extent of an LID. For a peak that is not over a background feature, the area of the LID increases smoothly as the k is decreased. However, for a peak that overlays a background feature, the area will sharply increase when the k drops below the level of the background feature.

Fig. 8. Diagram of the FODI online experiment device.

Fig. 9. Optical system of the IOM and the optical imaging lens.

Fig. 10. SR results. (a) Online original FODI image of wedge lens. (b) An example window of original resolution. (c) The 2× resolution of the HAN_SR (SSIM = 0.92). (d) The 4× resolution of the HAN_SR (SSIM = 0.91). (e) The 2× resolution of the CDC_SR (SSIM = 0.92). (f) The 4× resolution of the CDC_SR (SSIM = 0.91). (g) The 2× resolution of the integrated result (SSIM = 0.95). (h) The 4× resolution of the integrated result (SSIM = 0.94).

Fig. 11. Example result of SR image of one LID. (a) Online original FODI image of wedge lens. (b) An example of original resolution of an LID inside (94.0 µm). (c) The 2× integrated resolution of the LID. (d) The 4× integrated resolution of the LID.

Fig. 12. Adaptive LID segmentation results. (a) Online original image of wedge lens segmentation result. (b) The example window of the original resolution segmentation result (46 LID sites found). (c) The 2× integrated resolution image segmentation result (75 LID sites found). (d) The 4× integrated resolution image segmentation result (90 LID sites found).

Fig. 13. Quartile statistical chart of detection rate of LIDs (>50) in the 12 images of the original, 2×, and 4× integrated resolution.