Acta Optica Sinica, Volume. 18, Issue 1, 109(1998)

Normal-Incidence Mo/B4C Soft X-Ray Multilayer

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    References(7)

    [1] [1] D. G. Stearns, R. S. Rosen, S. P. Vernon. Normal-incidence X-ray mirror for 7 nm. Opt. Lett., 1991, 16(16): 1283~1285

    [2] [2] A. F. Jankowski, P. L. Perry. Characterization of Mo/B4C multilayer. Thin Solid Films, 1991, 206: 365~368

    [3] [3] C. Montcalm, B. T. Sullivan, S. Duguay et al.. In situ reflectance mensurements of soft X-ray/extreme-ultraviolet Mo/Y multilayer mirrors. Opt. Lett., 1995, 20(12): 1450~1452

    [4] [4] J. F. Seely, G. Gutman, J. Wood et al.. Normal-incidence reflectance of W/B4C multilayer mirrors in the 3450 A wavelength region. Appl. Opt., 1993, 32(19): 3541~3543

    [5] [5] A. I. Fedorenko, V. V. Kondratenko, Yu. P. Pershin et al.. Synthesis and measurement of normal incidence X-ray multilayer mirrors optimized for a photon energy of 390 eV. Proc. SPIE, 1993, 2012: 198~208

    [7] [7] B. L. Henke, P. Lee, T. J. Tanaka et al.. Low energy X-ray interaction coefficients: photoabsorption, scattering, and reflection E=100~2000 eV, Z=1~94. At. Data Nucl. Data Tables, 1982, (27): 1~82

    [8] [8] T. W. Barbee. Multilayers for X-ray optics. Proc. SPIE, 1985, 563: 2~28

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Normal-Incidence Mo/B4C Soft X-Ray Multilayer[J]. Acta Optica Sinica, 1998, 18(1): 109

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    Paper Information

    Category: Thin Films

    Received: Jul. 21, 1996

    Accepted: --

    Published Online: Oct. 18, 2006

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