Acta Optica Sinica, Volume. 18, Issue 1, 109(1998)
Normal-Incidence Mo/B4C Soft X-Ray Multilayer
The preliminary results of making Mo/B4C multilayer mirrors at wavelength below 10.0 nm are presented. The multilayer structure was calculated at designed wavelength (λ=8.0 nm), and the sample mirror were deposited by magnetron sputtering technique.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Normal-Incidence Mo/B4C Soft X-Ray Multilayer[J]. Acta Optica Sinica, 1998, 18(1): 109