This study proposes a CAD stereo model matching-based positional measurement method to solve the high-precision positioning problem of tiny targets in high-power laser devices. The proposed method uses CAD file information to construct a stereo model of the target and correlate it with 3-CCD multi-source images for matching， avoiding the error superposition problem arising from the separate processing of multi-source images in traditional positioning methods. In this study， we defined the matching degree function of the target based on the Chamfer distance conversion of the model exploration point， which was used to evaluate the matching degree of the model and target. A genetic algorithm （GA） was used to find the optimal solution of the function to obtain the measured poses of the target. To address the problem of the GA being susceptible to a local optimum， a hierarchical adaptive genetic algorithm （HAGA） was developed to improve the search accuracy and efficiency of the algorithm. To improve the system debugging efficiency of complex engineering， this study used the OpenGL graphics library to build a simulation system to realize the functions of target simulation imaging and offline algorithm debugging. The simulation system avoids the interference of various factors， such as installation error， processing error， and camera ambient light in the system， and can debug and verify the algorithm conveniently as well as improve the engineering efficiency. An experiment was performed using a 3-CCD positioning measurement platform for the positioning adjustment of different target collimation states. The measurement results showed that the target translation and positioning error was less than 3.5 μm， and the angle error was less than 0.07°， which is less than the error requirement of the actual measurement system. This verifies the feasibility of the measurement algorithm in actual engineering applications.