Journal of Inorganic Materials, Volume. 37, Issue 2, 230(2022)

Amorphous LiSiON Thin Film Electrolyte for All-solid-state Thin Film Lithium Battery

Qiuying XIA... Shuo SUN, Feng ZAN, Jing XU and Hui XIA* |Show fewer author(s)
Author Affiliations
  • School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
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    Figures & Tables(5)
    (a) XRD pattern and optical image of the Li2SiO3 target; (b) XRD pattern and optical image of typical sample LiSiON- 100N9A1; (c) Cross-section and (d) top-view FESEM images of the typical sample LiSiON-100N9A1
    (a) Survey-scan, (b) Si2p core-level, (c) O1s core-level, and (d) N1s core-level XPS spectra of Li2SiO3 target and typical sample LiSiON-100N9A1; (e) Schematic illustration of the partial structure change from Li2SiO3 to LiSiON with the incorporation of N
    (a) Electrochemical impedance spectroscopy (EIS) spectra of the LiSiON thin films deposited under different conditions; (b) Schematic illustration of the Pt/LiSiON/Pt sandwich structure and the corresponding equivalent circuit; (c) CV curves of the LiSiON thin films deposited under different conditions; (d) Chronoamperometry curve of the sample LiSiON-100N9A1
    (a) Cross-section FESEM image and corresponding EDS mapping images of the MoO3/LiSiON/Li TFLB; (b) Typical CV curve, (c) initial three charge/discharge curves, (d) rate performance, (e) cycle performance, and (f) EIS spectra at different cycle numbers of the MoO3/LiSiON/Li TFLB with sample LiSiON-100N9A1 as electrolyte
    • Table 1.

      Comparison of lithium ion conductivities and voltage windows of LiSiON thin films deposited under different conditions

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      Table 1.

      Comparison of lithium ion conductivities and voltage windows of LiSiON thin films deposited under different conditions

      SampleLithium ion conductivities /(×10-6, S∙cm-1) Voltage windows/V
      LiSiON-80N94.6~2.0
      LiSiON-100N97.1~3.9
      LiSiON-120N92.5~4.2
      LiSiON-100N9A16.3~5.0
      LiSiON-100N9A53.0~4.6
      LiSiON-100N5A52.9~5.2
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    Qiuying XIA, Shuo SUN, Feng ZAN, Jing XU, Hui XIA. Amorphous LiSiON Thin Film Electrolyte for All-solid-state Thin Film Lithium Battery[J]. Journal of Inorganic Materials, 2022, 37(2): 230

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    Paper Information

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    Received: Mar. 6, 2021

    Accepted: --

    Published Online: Nov. 14, 2022

    The Author Email: XIA Hui (xiahui@njust.edu.cn)

    DOI:10.15541/jim20210132

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