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Photonics Research, Volume. 9, Issue 4, 521(2021)

All-silicon dual-cavity fiber-optic pressure sensor with ultralow pressure-temperature cross-sensitivity and wide working temperature range

Xue Wang1,2, Junfeng Jiang1,3、*, Shuang Wang1,4、*, Kun Liu1, and Tiegen Liu1,5、*
Author Affiliations
  • 1School of Precision Instrument and Opto-electronics Engineering, Tianjin Optical Fiber Sensing Engineering Center, Institute of Optical Fiber Sensing of Tianjin University, Key Laboratory of Opto-electronics Information Technology, Tianjin University, Tianjin 300072, China
  • 2School of Electrical and Electronic Engineering, Engineering Research Center of Optoelectronic Devices and Communication Technology, Ministry of Education, Tianjin Key Laboratory of Film Electronic and Communication Devices, Tianjin University of Technology, Tianjin 300384, China
  • 3e-mail: jiangjfjxu@tju.edu.cn
  • 4e-mail: shuangwang@tju.edu.cn
  • 5e-mail: tgliu@tju.edu.cn
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    The article is cited by 40 article(s) from Web of Science.
    The article is cited by 5 article(s) CLP online library. (Some content might be in Chinese.)
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    Xue Wang, Junfeng Jiang, Shuang Wang, Kun Liu, Tiegen Liu. All-silicon dual-cavity fiber-optic pressure sensor with ultralow pressure-temperature cross-sensitivity and wide working temperature range[J]. Photonics Research, 2021, 9(4): 521

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    Paper Information

    Category: Optical Devices

    Received: Nov. 6, 2020

    Accepted: Feb. 3, 2021

    Published Online: Apr. 6, 2021

    The Author Email: Junfeng Jiang (jiangjfjxu@tju.edu.cn), Shuang Wang (shuangwang@tju.edu.cn), Tiegen Liu (tgliu@tju.edu.cn)

    DOI:10.1364/PRJ.414121

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology