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Infrared and Laser Engineering, Volume. 45, Issue 10, 1020002(2016)

Design and implementation of MEMS switch broadband programmable step attenuator

Nan Xueli*, Zhang Binzhen, Yang Xin, Cui Jianli, and Ge Shaolei
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    Nan Xueli, Zhang Binzhen, Yang Xin, Cui Jianli, Ge Shaolei. Design and implementation of MEMS switch broadband programmable step attenuator[J]. Infrared and Laser Engineering, 2016, 45(10): 1020002

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    Paper Information

    Category: 光电器件与微系统

    Received: Feb. 11, 2016

    Accepted: Mar. 23, 2016

    Published Online: Nov. 14, 2016

    The Author Email: Xueli Nan (nanxueli@yeah.net)

    DOI:10.3788/irla201645.1020002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology