Acta Optica Sinica, Volume. 30, Issue 6, 1667(2010)
A New Optical Proximity Correction with Mapping Model between Segments and Control Sites
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
Yang Yiwei, Shi Zheng. A New Optical Proximity Correction with Mapping Model between Segments and Control Sites[J]. Acta Optica Sinica, 2010, 30(6): 1667
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Jun. 25, 2009
Accepted: --
Published Online: Jun. 7, 2010
The Author Email: Yiwei Yang (yangyw@vlsi.zju.edu.cn)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20