Chinese Optics Letters, Volume. 13, Issue 2, 023101(2015)
Moisture absorption characteristics of a SiO2 film from 2 to 3 μm
Figures & Tables(11)
Fig. 1. Variations in the FTIR spectra of
Fig. 2. Variations in the FTIR spectra of
Fig. 4. Surface structures of coatings deposited by IBS on different substrates.
Fig. 5. Scanning electron microscopy (SEM) cross sectional morphology of a coating fabricated by IBS.
Fig. 6. Surface structures of
Fig. 7. SEM cross sectional morphology of a coating fabricated by EBE.
Fig. 8. Mean pore sizes of the
Table 1. Parameters of the Coating Process
View tableView in ArticleTable 1. Parameters of the Coating Process
Deposition Method Coating Material Substrate Baking Temperature (°C) Base Pressure (Pa) Pressure (Pa) Thickness (μm) EBE Fused quartz, silicon crystal, and alumina crystal 300 2 IBS 70 2
Table 2. Water Vibrations in the Mid-Infrared Spectral Region
View tableView in ArticleTable 2. Water Vibrations in the Mid-Infrared Spectral Region
Sample Wavenumber ( ) Wavelength (μm) Vibration Mode References Water 3280 3.05 Stretching OH Symmetric, [ 9 ]3490 2.86 Stretching OH Asymmetric, Solid phase of water 3200 3.13 OH stretching of ice structure [ 10 ]Liquid phase of water 3400 2.94 OH stretching of liquid structure Mesoporous silica 3400 2.94 OH in free [ 11 ]3672 2.72 OH in Si-OH Mesoporous silicon oxide 3230 3.10 OH stretching of ice-like structure [ 12 ]3400 2.94 OH stretching of liquid structure
Table 3. Coefficients of Thermal Expansion of the Substrates and Coating
View tableView in ArticleTable 3. Coefficients of Thermal Expansion of the Substrates and Coating
Material Coefficient of Thermal Expansion ( ) References Fused quartz 0.5 [ 17 ]Silicon crystal 3.6 [ 18 ]Alumina crystal 7.3–8.1 [ 18 ]coating prepared by EBE 0.4 [ 19 ]
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Yun Cui, Hao Li, Kui Yi, Jianda Shao. Moisture absorption characteristics of a SiO2 film from 2 to 3 μm[J]. Chinese Optics Letters, 2015, 13(2): 023101
Paper Information
Category: Thin films
Received: Jul. 31, 2014
Accepted: Nov. 28, 2014
Published Online: Sep. 25, 2018
The Author Email: Yun Cui (cuiyun@siom.ac.cn)
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