Acta Photonica Sinica, Volume. 52, Issue 2, 0212004(2023)
F/0.78 High Order Aspheric Surface Testing with Null Compensator and Mapping Distortion Correction
Figures & Tables(15)
Fig. 2. High order aspheric surface testing with three-piece lens null compensator
Fig. 3. The interactive interface of initial structural parameters calculation program
Fig. 6. High-order aspheric surfaces testing with three-piece lens compensator
Fig. 7. High-order aspheric surface imaging with null lens compensator
Fig. 10. Optical deterministic polishing based on distortion correction map
Table 1. Parameters of high-order aspheric surface
View tableView in ArticleTable 1. Parameters of high-order aspheric surface
Parameters Value Vertex curvature radius -491.14 Conic constant 1.43 4th coefficient 9.09×10-10 6th coefficient 4.73×10-15 8th coefficient 8.46×10-20
Table 2. Structure data of null lens compensator
View tableView in ArticleTable 2. Structure data of null lens compensator
Surface No. Radius/mm Thickness/mm Material Semi-diameters/mm Focal length/mm 0 Infinity 59.89 — — — 1 16.225 5.65 HK9L 9.08 -272.70 2 12.823 75.52 8.28 3 -106.66 8.16 HK9L 26.07 -448.74 4 -203.2 0.54 28.47 5 58.08 9.00 HK9L 32.40 -7450.73 6 54.20 396.18 31.93
Table 3. Tolerances and error budget for null lens compensator
View tableView in ArticleTable 3. Tolerances and error budget for null lens compensator
Parameter Units Design value Tolerance Wavefront（RMS@632.8 nm） Reference surface irregularity
of interferometer（RMS）
λ — 0.009 0.009 Airspace mm 59.89 0.01 3.92×10-7 Lens 1： Radius 1 Fringe 16.225 1 2.24×10-6 Thickness mm 5.65 0.01 4.37×10-6 Radius 2 Fringe 12.823 1 2.97×10-6 Surface 1 irregularity（RMS） λ — 1/80 1.29×10-2 Surface 2 irregularity（RMS） λ — 1/80 1.29×10-2 Index of refraction — 1.516 85 0.000 1 6.31×10-7 Index inhomogeneity — — 2×10-6 3×10-3 Airspace 1 mm 75.52 0.01 7.22×10-7 Lens 2： Radius 1 Fringe -106.66 1 1.43×10-6 Thickness mm 8.16 0.01 2.31×10-7 Radius 2 Fringe -203.2 1 1.27×10-6 Surface 1 irregularity（RMS） λ — 1/80 1.29×10-2 Surface 2 irregularity（RMS） λ — 1/80 1.29×10-2 Index of refraction — 1.516 85 0.000 1 1.3×10-6 Index inhomogeneity — — 2×10-6 4.5×10-3 Airspace 2 mm 0.54 0.01 1.75×10-6 Lens 3： Radius 1 Fringe 58.08 1 2.83×10-8 Thickness mm 9 0.01 3.69×10-6 Radius 2 Fringe 54.2 1 3.44×10-7 Surface 1 irregularity（RMS） λ — 1/80 1.29×10-2 Surface 2 irregularity（RMS） λ — 1/80 1.29×10-2 Index of refraction — 1.516 85 0.000 1 3.4×10-7 Index inhomogeneity — — 2×10-6 5×10-3 Airspace 3 mm 396.18 0.02 8.44×10-8 Residual Wavefront λ — — 0.001 2 RSS 0.017
Table 4. Tolerances of null lens compensator
View tableView in ArticleTable 4. Tolerances of null lens compensator
Parameters Tolerance Radius of curvature/ Fringe ±1 Surface irregularity（RMS）/λ 1/80 Lens thickness/mm ±0.01 Airspace/mm ±0.01 Index of refraction ±0.000 1 Index inhomogeneity 2×10-6 Decenter/mm ±0.01 Tilt/（°） ±0.005
Table 5. Parameters of ZYGO transmission spheres for testing surface irregularity of null lens compensator
View tableView in ArticleTable 5. Parameters of ZYGO transmission spheres for testing surface irregularity of null lens compensator
Surface No. Radius/mm F number Clear aperture diameter/mm 1 16.225 0.75 64.0 2 12.823 0.75 64.0 3 -106.66 1.5 82.0 4 -203.2 3.3 91.0 5 58.08 1.5 82.0 6 54.20 0.75 64.0
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Sanfeng HAO, Jian ZHANG, Jianfeng YANG. F/0.78 High Order Aspheric Surface Testing with Null Compensator and Mapping Distortion Correction[J]. Acta Photonica Sinica, 2023, 52(2): 0212004
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Sep. 16, 2022
Accepted: Sep. 28, 2022
Published Online: Mar. 28, 2023
The Author Email: ZHANG Jian (zj@opt.ac.cn)
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