Acta Photonica Sinica, Volume. 37, Issue 1, 6(2008)
Simulation Study of Thermal Results of Si Film Irradiated by Sub-picosecond Pulses Laser
[4] [4] CHEN J K,BERAUN J E,THAM C L.Ultrafast thermoelasticity for short-pulse laser heating[J].Int J Eng Sci,2004,42(8-9):793-807.
[5] [5] CHEN J K,TZOU D Y,BERAUN J E.Numerical investigation of ultrashort laser damage in semiconductors[J].International Journal of Heat and Mass Transfer,2005,48(3-4):501-509.
[6] [6] SOKOLOWSKI-TINTEN K,Von der LINDE D.Generation of dense electron-hole plasmas in silicon[J].Phys Rev B,2000,61(4):2643-2650.
[7] [7] ALLENSPACHER P,H(U)TTNER B,RIEDE W.Ultrashort pulse damage of Si and Ge semiconductors[C].SPIE,2003,4932:358-365.
[8] [8] Van DRIEL H M.Kinetics of high-density plasmas generated in Si by 1.06 and 0.53 μm picosecond laser pulses[J].Phys Rev B,1987,35(15):8166-8176.
[9] [9] GALLANT M I,van DRIEL H M.Infrared reflectivity probing of thermal and spatial properties of laser-generated carriers in germanium[J].Phys Rev B,1982,26(4):2133-2146.
[10] [10] AGASSI D.Phenomenological model for picosecond-pulse laser annealing of semiconductors[J].J Appl Phys,1984,55:4376-4383.
[11] [11] SJODIN T,PETEK H,DAI H L.Ultrafast carrier dynamics in silicon:a two-color transient reflection grating study on a (111) surface[J].Phys Rev Lett,1998,81(25):566.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Simulation Study of Thermal Results of Si Film Irradiated by Sub-picosecond Pulses Laser[J]. Acta Photonica Sinica, 2008, 37(1): 6