Design and fabrication of polarization and phase modulated beam splitter

Average T:R@1500-1600 nm	（8±2）∶（92 $ \mp 2 $）
$\left\|{{T} }_{s}-{{T} }_{p}\right\|$ and $\left\|{{R} }_{s}-{{R} }_{p}\right\|$	≤3%
$ \left\|{\Delta }_{t}\right\| $@1530 nm, 1540 nm, 1550 nm, 1560 nm	≤7°
$ \left\|{\Delta }_{r}\right\| $@1530 nm, 1540 nm, 1550 nm, 1560 nm	≤10°

Table 2. Preparation process parameters
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Table 2. Preparation process parameters
Material Rate/nm·s⁻¹ EB oxygenation/sccm APS
Bias voltage/V Discharged current/A
Al₂O₃ 0.3 0 100 45
Ag 1 0 30 20
Ta₂O₅ 0.3 35 130 50
SiO₂ 0.8 10 160 55

Table 3. Extinction ratio and phase difference date

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Table 3. Extinction ratio and phase difference date

λ/nm	I_max/mW		I_min/mW		ER		$ \mathrm{\delta } $/(°)
λ/nm	T	R	T	R	T	R	T	R
1 530	0.43	4.24	0.402×10−3	7.323×10−3	1 070:1	579：1	3.5	4.76
1 540	0.41	4.31	0.502×10−3	11.402×10−3	817:1	378：1	4.01	5.89
1 550	0.40	4.37	0.593×10−3	16.125×10−3	675:1	271：1	4.41	6.95
1 560	0.38	4.43	0.731×10−3	21.931×10−3	520:1	202：1	5.02	8.05

Table 4. Reliability results of beam splitter
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Table 4. Reliability results of beam splitter
Test items Results
Adhesion test Pass
Soaking test Pass
Heat and humidity test Pass
Alternating high and low temperature test humidity and temperature Pass

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Yonggang Pan, Sibao Zhang, Zheng Liu, Wencheng Liu, Mian Li, Chunjuan Zhang, Changxin Luo. Design and fabrication of polarization and phase modulated beam splitter[J]. Infrared and Laser Engineering, 2022, 51(5): 20210512

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