Acta Optica Sinica, Volume. 37, Issue 1, 131002(2017)

Influence of Annealing Technology on Spectral Properties of SiCx Thin Films Containing Silicon Quantum Dots

Zhao Fei1,2、*, Yang Wen1,2, Chen Xiaobo1,2, and Yang Peizhi1,2
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    Zhao Fei, Yang Wen, Chen Xiaobo, Yang Peizhi. Influence of Annealing Technology on Spectral Properties of SiCx Thin Films Containing Silicon Quantum Dots[J]. Acta Optica Sinica, 2017, 37(1): 131002

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    Paper Information

    Category: Thin Films

    Received: Aug. 23, 2016

    Accepted: --

    Published Online: Jan. 13, 2017

    The Author Email: Fei Zhao (18487073495@163.com)

    DOI:10.3788/aos201737.0131002

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