[1] [1] SANG H L，PATRICK N， GOLDBERG K A, et al.. Phase-shifting point-diffraction interferometery at 193nm[J]. Appl. Opt.，2000，39(31)：5768-5772.

[2] [2] TORU F，KOSUKE S，YASUSHI M, et al.. Integrated projecting optics tester for inspection of immersion ArF scanner[J]. SPIE, 2006， 6152,37:1-7.

[3] [3] CHENG SH Y，CAO ZH L，HU L F, et al.. Measurement of wavefront aberrations of human eyes with Shack-Hartmann wavefront sensor[J]. Opt. Precision Eng.，2010，18(5)：1060-1067. (in Chinese)

[4] [4] MA Q, LIU W Q, LI X B, et al.. Analysis of diffraction wavefront error in point diffraction interferometer[J]. Acta Optica Sinica, 2008，28(12)：2321-2324. (in Chinese)

[5] [5] GOLDBERG K A， TEJNIL E， BOKOR J. A 3-D numerical study of pinhole diffraction to predict of accuracy of EUV point diffraction interferometery[J]. Optical Society of America，1996.

[6] [6] YOSHIYUKI S，AKIYOSHI S，MASANOBU H, et al.. Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers[J]. J. Vac. Sci. Technol. B，2004，22(1)：104-108.

[7] [7] OTAKI K, ZHU Y, ISHII M, et al.. Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL[J]. SPIE，2004, 5193: 182-190.

[8] [8] GE D B，YAN Y B. The Finite Difference Time Domain Method for Electromagnetic[M]. Xi′an: Xidian University Press，2005:11-34. (in Chinese)

[9] [9] MA D M，CHEN T Q，LIU ZH X, et al.. Application of phase retrieval technology in evaluation of optical imaging system[J]. Opt. Precision Eng.，2009，17(12)：2912-2918. (in Chinese)

[10] [10] HUI M，NIU H B. A method of wavefront data fitting using Zernike polynomials[J]. Acta Photonica Sinica，1999，28(12)：1113-1116.(in Chinese)

[11] [11] QI B，CHEN H B，LIU SH F, et al.. Regression analysis of wavefront fitting using Zernike polynomial[J]. Opt. Precision Eng.，2007，15(3)：396-400. (in Chinese)