Optics and Precision Engineering, Volume. 20, Issue 3, 499(2012)

Analysis of wave-front error for nanometer pinhole vector diffraction

WANG Li1...2,*, RAO Chang-hui3 and RAO Xue-jun3 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(11)

    [1] [1] SANG H L,PATRICK N, GOLDBERG K A, et al.. Phase-shifting point-diffraction interferometery at 193nm[J]. Appl. Opt.,2000,39(31):5768-5772.

    [2] [2] TORU F,KOSUKE S,YASUSHI M, et al.. Integrated projecting optics tester for inspection of immersion ArF scanner[J]. SPIE, 2006, 6152,37:1-7.

    [5] [5] GOLDBERG K A, TEJNIL E, BOKOR J. A 3-D numerical study of pinhole diffraction to predict of accuracy of EUV point diffraction interferometery[J]. Optical Society of America,1996.

    [6] [6] YOSHIYUKI S,AKIYOSHI S,MASANOBU H, et al.. Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers[J]. J. Vac. Sci. Technol. B,2004,22(1):104-108.

    [7] [7] OTAKI K, ZHU Y, ISHII M, et al.. Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL[J]. SPIE,2004, 5193: 182-190.

    [8] [8] GE D B,YAN Y B. The Finite Difference Time Domain Method for Electromagnetic[M]. Xi′an: Xidian University Press,2005:11-34. (in Chinese)

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    [10] [10] HUI M,NIU H B. A method of wavefront data fitting using Zernike polynomials[J]. Acta Photonica Sinica,1999,28(12):1113-1116.(in Chinese)

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    WANG Li, RAO Chang-hui, RAO Xue-jun. Analysis of wave-front error for nanometer pinhole vector diffraction[J]. Optics and Precision Engineering, 2012, 20(3): 499

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    Paper Information

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    Received: Sep. 20, 2011

    Accepted: --

    Published Online: Apr. 16, 2012

    The Author Email: Li WANG (wangli9613@126.com)

    DOI:10.3788/ope.20122003.0499

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