Optics and Precision Engineering, Volume. 20, Issue 3, 499(2012)
Analysis of wave-front error for nanometer pinhole vector diffraction
[1] [1] SANG H L,PATRICK N, GOLDBERG K A, et al.. Phase-shifting point-diffraction interferometery at 193nm[J]. Appl. Opt.,2000,39(31):5768-5772.
[2] [2] TORU F,KOSUKE S,YASUSHI M, et al.. Integrated projecting optics tester for inspection of immersion ArF scanner[J]. SPIE, 2006, 6152,37:1-7.
[5] [5] GOLDBERG K A, TEJNIL E, BOKOR J. A 3-D numerical study of pinhole diffraction to predict of accuracy of EUV point diffraction interferometery[J]. Optical Society of America,1996.
[6] [6] YOSHIYUKI S,AKIYOSHI S,MASANOBU H, et al.. Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers[J]. J. Vac. Sci. Technol. B,2004,22(1):104-108.
[7] [7] OTAKI K, ZHU Y, ISHII M, et al.. Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL[J]. SPIE,2004, 5193: 182-190.
[8] [8] GE D B,YAN Y B. The Finite Difference Time Domain Method for Electromagnetic[M]. Xi′an: Xidian University Press,2005:11-34. (in Chinese)
[9] [9] MA D M,CHEN T Q,LIU ZH X, et al.. Application of phase retrieval technology in evaluation of optical imaging system[J]. Opt. Precision Eng.,2009,17(12):2912-2918. (in Chinese)
[10] [10] HUI M,NIU H B. A method of wavefront data fitting using Zernike polynomials[J]. Acta Photonica Sinica,1999,28(12):1113-1116.(in Chinese)
Get Citation
Copy Citation Text
WANG Li, RAO Chang-hui, RAO Xue-jun. Analysis of wave-front error for nanometer pinhole vector diffraction[J]. Optics and Precision Engineering, 2012, 20(3): 499
Category:
Received: Sep. 20, 2011
Accepted: --
Published Online: Apr. 16, 2012
The Author Email: Li WANG (wangli9613@126.com)