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Optics and Precision Engineering, Volume. 13, Issue 1, 73(2005)

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References(4)

[3] [3] KIM J J,JEONG Y H,CHO D W.Thermal behavior of a machine tool equipped with linear motors[J]. International Journal of Machine Tools and Manufacture ,2004,44:749-758.

[4] [4] JUNG D O,Dai GIL S. Thermal characteristics of composite sandwich structures for machine tool moving body applications[J]. Composite Structures , 2004,(66):429-438.

[6] [6] HIDENORI S,HITOSHI H.Nanometer positioning of a linear motor-driven ultraprecision aerostatic table system with electrorheological fluid dampers CIRP[J]. Annals - Manufacturing Technology,Issue,1999,48:289-292.

[7] [7] HIDENORI S,HITOSHI H.Study on nanometer positioning table system equipped with electrorheological fluid units[C]. JSME international journal.series C: mechanical systems. Machine Elements and Manufacturing,2000,43:183-189.