[1] [1] Raciukaitis G, Grubinskas S, Gecys P, et al. Selectiveness of laser processing due to energy coupling localization: Case of thin film solar cell scribing[J]. Applied Physics A, 2013, 112(1): 93-98.

[2] [2] Zhong Minlin, Liu Wenjin. Leading areas and hot topics on global laser materials processing research[J]. Chinese J Lasers, 2008, 35(11): 1653-1659.

[3] [3] Ji Lingfei, Ling Chen, Li Qiurui, et al. Research progress and development of industrial application of picosecond laser processing[J]. Chinese Journal of Mechanical Engineering, 2014, 50(5): 115-126.

[4] [4] Yang Huan, Huang Shan, Duan Jun, et al. Contrastive study on laser ablation of single-crystal silicon by 1030 nm femtosecond laser and 355 nm nanosecond laser[J]. Chinese J Lasers, 2013, 40(1): 0103003.

[5] [5] Yu X, Ma J, Lei S. Femtosecond laser scribing of Mo thin film on flexible substrate using axicon focused beam[J]. Journal of Manufacturing Processes, 2015, 20: 349-355.

[6] [6] Compaan A D, Matulionis I, Nakade S. Laser scribing of polycrystalline thin films[J]. Optics and Lasers in Engineering, 2000, 34(1): 15-45.

[7] [7] Moon S J, Yum J H, Lofgren L, et al. Laser-scribing patterning for the production of organometallic halide perovskite solar modules[J]. IEEE Journal of Photovoltaics, 2015, 5(4): 1087-1092.

[8] [8] Ruthe D, Zimmer K, Hche T. Etching of CuInSe2 thin films-comparison of femtosecond and picosecond laser ablation[J]. Applied Surface Science, 2005, 247(1): 447-452.

[9] [9] Gecys P, Raciukaitis G, Miltenis E, et al. Scribing of thin-film solar cells with picosecond laser pulses[J]. Physics Procedia, 2011, 12(1): 141-148.

[10] [10] Burn A, Muralt M, Pilz S, et al. All fiber laser scribing of Cu (In, Ga) Se2 thin-film solar modules[J]. Physics Procedia, 2013, 41(1): 713-722.

[11] [11] Wang X, Ehrhardt M, Lorenz P, et al. The influence of the laser parameter on the electrical shunt resistance of scribed Cu (InGa) Se2 solar cells by nested circular laser scribing technique[J]. Applied Surface Science, 2014, 302(13): 194-197.

[12] [12] Jiménez-Olarte D, Vigil-Galán O, de la Rosa J, et al. Laser scribing of fluorine doped tin oxide for serial interconnection of CdS/CdTe solar cells[J]. Revista Mexicana de Física, 2015, 61(3): 160-165.

[13] [13] García-Ballesteros J J, Torres I, Lauzurica S, et al. Influence of laser scribing in the electrical properties of a-Si:H thin film photovoltaic modules[J]. Solar Energy Materials and Solar Cells, 2011, 95(3): 986-991.

[14] [14] Wang J, Wang H, Du J, et al. Performance improvement of amorphous silicon see-through solar modules with high transparency by the multi-line ns-laser scribing technique[J]. Optics and Lasers in Engineering, 2013, 51(11): 1206-1212.

[15] [15] Wang H L, Hsu S T, Tan H D, et al. Predictive modeling for glass-side laser scribing of thin film photovoltaic cells[J]. Journal of Manufacturing Science and Engineering, 2013, 135(5): 919-933.

[16] [16] Chen Jimin, Zuo Tiechuan. Effect of laser beam incident angle on laser cutting quality[J]. Chinese J Lasers, 2001, 28(11): 1037-1040.