Acta Photonica Sinica, Volume. 51, Issue 2, 0251210(2022)

Research on Si-induced Quantum Well Intermixing Based on Cyclic Annealing(Invited)

Yuxiao WANG1,2, Lingni ZHU1、*, Li ZHONG1,3、*, Qiong QI1, Wei LI1, Suping LIU1, and Xiaoyu MA1,3
Author Affiliations
  • 1National Engineering Research Center for Opto-electronic Devices Institute of Semiconductors,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
  • 2School of Electronic,Electrical and Communication Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
  • 3College of Materials Science and Opto-electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China
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    References(16)

    [2] Yue SONG, Yongqiang NING, Li QIN et al. Review on the methods of preventing catastrophic optical mirror damage in high-power diode lasers. Semiconductor Optoelectronics, 41, 618-626(2020).

    [3] Cuicui LIU. Study on the quantum well intermixing induced by Si impurities in InGaAs/AlGaAs high power semiconductor lasers(2020).

    [4] Nan YAO, Yihao ZHAO, Suping LIU et al. High power 915 nm semiconductor lasers with non-absorbing windows. Semiconductor Technology, 40, 596-600(2015).

    [5] Cuicui LIU, Nan LIN, Cong XIONG et al. Intermixing in InGaAs/AlGaAs quantum well structuresinduced by the interdiffusion of Si impurities. Chinese Optics, 13, 203-216(2020).

    [7] Chunyang GUO, Ruiying ZHANG, Jiwan LIU et al. InGaAsP/InGaAsP quantum well intermixing induced by impurity free vacancy enhanced through Cu/SiO2 deposition. Semiconductor Technology, 44, 189-193(2019).

    [13] Haitao PENG. Improving the COD level of high-power semiconductor lasers using quantum well intermixing(2007).

    [16] Shengjie LIN, Jianjun LI, Linjie HE et al. Enhanced AlGaAs/InGaAs quantum well intermixing by the tech-nology of cycles annealing. Journal of Optoelectronics · Laser, 25, 1471-1475(2014).

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    Yuxiao WANG, Lingni ZHU, Li ZHONG, Qiong QI, Wei LI, Suping LIU, Xiaoyu MA. Research on Si-induced Quantum Well Intermixing Based on Cyclic Annealing(Invited)[J]. Acta Photonica Sinica, 2022, 51(2): 0251210

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    Paper Information

    Category: Special Issue for Ultrafast Optics

    Received: Nov. 11, 2021

    Accepted: Jan. 19, 2022

    Published Online: May. 19, 2022

    The Author Email: ZHU Lingni (lingxiao431@semi.ac.cn), ZHONG Li (zhongli@semi.ac.cn)

    DOI:10.3788/gzxb20225102.0251210

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