Infrared and Laser Engineering, Volume. 35, Issue 5, 519(2006)

Design of hybrid diffractive-refractive f-θ lens for CO2 laser drilling

[in Chinese]1,2、*, [in Chinese]1, and [in Chinese]1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(5)

    [1] [1] YOKOHAGI D,MIZUTANI Y,ICHIHASHI K,et al.Development of a high-performance UV-DPSS laser drillin system for PWB[C]/ /Proceedings of SPIE,Second International Symposium on Laser Precision Microfabrication,2002,4426:464-468.

    [2] [2] PARGELLIS A N,AU D,LAKE T V,et al.Formation of microvias in epoxy-glass composites by laser ablation[J].Optics and Laser Technology,1990,22(3):205-207.

    [4] [4] SWANSON G J,VELDKAMP W B.Diffractive optical elements for use in infrared systems[J].Optical Engineering,1989,28(6):605-608.

    [6] [6] Keiji Fuse.F-θ lens:United States Patent,6,324,015 B1[P].

    [7] [7] FUSE K,OKADA T,EBATA K.Diffractive/rerractive hybrid ftheta lens for laser drilling of multilayer printed circuit boards[C]//Proceedings of SPIE third Interntional Symposium on Laser Precision Microfabrication,2003,4830:95-100.

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    [in Chinese], [in Chinese], [in Chinese]. Design of hybrid diffractive-refractive f-θ lens for CO2 laser drilling[J]. Infrared and Laser Engineering, 2006, 35(5): 519

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    Paper Information

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    Received: Dec. 20, 2005

    Accepted: Jan. 18, 2006

    Published Online: May. 23, 2007

    The Author Email: (Email:zhangyuncui2@163.com)

    DOI:

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