Laser & Optoelectronics Progress, Volume. 53, Issue 12, 121403(2016)
Interaction Between Excimer Laser and SiC Ceramic
Irradiation experiments are conducted on the SiC ceramic using excimer lasers with different pulse number, single-pulse energy, and repetition frequency. The two-dimensional and three-dimensional damage morphologies of irradiation-damaged SiC ceramic are acquired, and the microscopic damage mechanism is analyzed. The results indicate that, with 193 nm excimer laser irradiating on SiC ceramic, both the photo-thermal and photo-chemical effects are involved and the photo-thermal effect is dominant. The macroscopic damage morphology is closely related to laser irradiation parameters and the increment of either the irradiation pulse number or single-pulse energy aggravates the irradiation damage. Increasing the laser repetition frequency results in a little reduction of scratch depth.
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[in Chinese]. Interaction Between Excimer Laser and SiC Ceramic[J]. Laser & Optoelectronics Progress, 2016, 53(12): 121403
Category: Lasers and Laser Optics
Received: Jun. 17, 2016
Accepted: --
Published Online: Dec. 14, 2016
The Author Email: (luoyan@aoe.ac.cn)