Optics and Precision Engineering, Volume. 31, Issue 11, 1593(2023)
Multi-degree-of-freedom measurement for space inertial test mass via laser interference
[1] [1] 1杨彪, 胡添元. 空间站微重力环境研究与分析[J]. 载人航天, 2014, 20(2): 178-183. doi: 10.3969/j.issn.1674-5825.2014.02.015YANGB, HUT Y. Study and analysis of microgravity environment onboard manned space station[J]. Manned Spaceflight, 2014, 20(2): 178-183.(in Chinese). doi: 10.3969/j.issn.1674-5825.2014.02.015
[2] [2] 2周浩, 罗志才, 周泽兵, 等. 基于天琴一号观测数据反演地球重力场模型[J]. 华中科技大学学报(自然科学版), 2022, 50(9): 117-125.ZHOUH, LUOZ C, ZHOUZ B, et al. Earth’s gravity field determination based on Tianqin-1 observations[J]. Journal of Huazhong University of Science and Technology (Nature Science Edition), 2022, 50(9): 117-125.(in Chinese)
[3] [3] 3吴书清, 李天初. 绝对重力仪的技术发展: 光学干涉和原子干涉[J]. 光学学报, 2021, 41(1): 0102002. doi: 10.3788/aos202141.0102002WUSH Q, LIT CH. Technical development of absolute gravimeter: optical interference and atomic interference[J]. Acta Optica Sinica, 2021, 41(1): 0102002.(in Chinese). doi: 10.3788/aos202141.0102002
[4] J W CONKLIN. Drift mode accelerometry for spaceborne gravity measurements. Journal of Geodesy, 89, 1053-1070(2015).
[5] [5] 5谈宜东, 徐欣, 张书练. 激光干涉精密测量与应用[J]. 中国激光, 2021, 48(15): 1504001. doi: 10.3788/cjl202148.1504001TANY D, XUX, ZHANGSH L. Precision measurement and application of laser interference[J]. Chinese Journal of Lasers, 2021, 48(15): 1504001.(in Chinese). doi: 10.3788/cjl202148.1504001
[6] J W KIM, C S KANG, J A KIM et al. A compact system for simultaneous measurement of linear and angular displacements of nano-stages. Optics Express, 15, 15759-15766(2007).
[7] J H ZHANG, C H MENQ. A linear/angular interferometer capable of measuring large angular motion. Measurement Science and Technology, 10, 1247-1253(1999).
[8] S J ZHAO, H Y WEI, Y LI. Dual-frequency laser displacement and angle interferometer, 9276, 374-379(2014).
[9] [9] 9颜浩. 基于激光干涉的高精度多自由度光学传感研究[D]. 武汉: 华中科技大学, 2019.YANH. Study on Ultra-precision Multi-degree-of-freedom Optical Measurement Base on Laser Interferometry[D]. Wuhan: Huazhong University of Science and Technology, 2019. (in Chinese)
[10] Z P ZHANG, C H MENQ. Laser interferometric system for six-axis motion measurement. Review of Scientific Instruments, 78(2007).
[11] Z P ZHANG, C H MENQ. Six-axis magnetic levitation and motion control. IEEE Transactions on Robotics, 23, 196-205(2007).
[12] P Z JIA, B ZHANG, Q B FENG et al. Simultaneous measurement of 6DOF motion errors of linear guides of CNC machine tools using different modes. Sensors (Basel, Switzerland), 20, DOI: 3439.(2020).
[13] C X CUI, Q B FENG, B ZHANG et al. System for simultaneously measuring 6DOF geometric motion errors using a polarization maintaining fiber-coupled dual-frequency laser. Optics Express, 24, 6735-6748(2016).
[14] [14] 14孙闯. 面向精密工程的多自由度测量方法研究[D]. 北京: 中国科学院大学, 2021.SUNCH. Research on Multi-degree-of-freedom Measurement Method for Precision Engineering[D]. Beijing: University of Chinese Academy of Sciences, 2021. (in Chinese)
[15] [15] 15吕勇, 冯其波, 刘立双, 等. 基于多准直光的六自由度测量方法[J]. 红外与激光工程, 2014, 43(11): 3597-3602. doi: 10.3969/j.issn.1007-2276.2014.11.016LÜY, FENGQ B, LIUL SH, et al. Six-degree-of-freedom measurement method based on multiple collimated beams[J]. Infrared and Laser Engineering, 2014, 43(11): 3597-3602.(in Chinese). doi: 10.3969/j.issn.1007-2276.2014.11.016
[16] F J ZHENG, Q B FENG, B ZHANG et al. A high-precision laser method for directly and quickly measuring 21 geometric motion errors of three linear axes of computer numerical control machine tools. The International Journal of Advanced Manufacturing Technology, 109, 1285-1296(2020).
[17] [17] 17高玉娥, 刘伟, 吕世猛, 等. 基于位置敏感探测器的六自由度精密位姿测量系统[J]. 光学 精密工程, 2018, 26(12):2930-2939. doi: 10.3788/ope.20182612.2930GAOY, LIUW, LÜSH M, et al. Six-degree-of-freedom displacement and angle measurement system based on two-dimensional position-sensitive detector[J]. Optics and Precision Engineering, 2018, 26(12):2930-2939. (in Chinese). doi: 10.3788/ope.20182612.2930
[18] [18] 18陈家键, 胡慧珠, 缪立军, 等. 双频激光干涉三自由度微振动测量系统[J]. 光学 精密工程, 2019, 27(7):1435-1443. doi: 10.3788/OPE.20192707.1435CHENJ J, HUH ZH, MIAOL J, et al. Three-degree-of-freedom micro-vibration measurement system based on dual-frequency laser interference[J]. Optics and Precision Engineering, 2019, 27(7):1435-1443. (in Chinese). doi: 10.3788/OPE.20192707.1435
[19] [19] 19匡萃方, 冯其波, 刘欣. 用矢量方法分析角锥棱镜的反射特性[J]. 应用光学, 2004, 25(2): 25-27,50. doi: 10.3969/j.issn.1002-2082.2004.02.007KUANGC F, FENGQ B, LIUX. Analysis of reflection property of cube-corner retroreflector with vector expression[J]. Journal of Applied Optics, 2004, 25(2): 25-27, 50. (in Chinese). doi: 10.3969/j.issn.1002-2082.2004.02.007
[20] [20] 20杨新刚, 黄玉美. 激光干涉测长未对准误差分析[J]. 光子学报, 2010, 39(2): 311-315. doi: 10.3788/gzxb20103902.0311YANGX G, HUANGY M. Misalignment error anglysis in laser interference length measurement[J]. Acta Photonica Sinica, 2010, 39(2): 311-315.(in Chinese). doi: 10.3788/gzxb20103902.0311
[21] [21] 21朱陆陆. 蒙特卡洛方法及应用[D]. 武汉: 华中师范大学.ZHUL L. Monte Carlo Method and Its Application[D]. Wuhan: Central China Normal University. (in Chinese)
[22] [22] 22刘亚睿. 外差干涉测量系统主要误差源的分析与抑制技术研究[D]. 杭州: 中国计量大学.LIUY R. Analysis of Main Error Sources in Heterodyne Interferometry System and Research on Suppression Technology[D]. Hangzhou: China University of Metrology. (in Chinese)
[23] Y Q ZHANG, A S HINES, G VALDES et al. Investigation and mitigation of noise contributions in a compact heterodyne interferometer. Sensors, 21, 5788(2021).
Get Citation
Copy Citation Text
Rui MA, Nan LI, Jianguo HE, Jianquan ZHANG, Min HUANG. Multi-degree-of-freedom measurement for space inertial test mass via laser interference[J]. Optics and Precision Engineering, 2023, 31(11): 1593
Category: Modern Applied Optics
Received: Nov. 26, 2022
Accepted: --
Published Online: Jul. 4, 2023
The Author Email: LI Nan (linan@csu.ac.cn)