[1] [1] S K Sundaram, E Mazur. Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses [J]. Nature Materials, 2002, 1(4): 217-224.

[2] [2] D K Das, T M Pollock. Femtosecond laser machining of cooling holes in thermal barrier coated CMSX4 superalloy [J]. Journal of Materials Processing Technology, 2009, 209(15): 5661-5668.

[3] [3] Q Feng, Y N Picard, H Liu, et al.. Femtosecond laser micromachining of a single-crystal superalloy [J]. Scripta Materialia, 2005, 53(5): 511-516.

[4] [4] Q Feng, Y N Picard, J P McDonald, et al.. Femtosecond laser machining of single-crystal superalloys through thermal barrier coatings [J]. Materials Science and Engineering A, 2006, 430(1-2): 203-207.

[5] [5] R R Gattass, E Mazur. Femtosecond laser micromachining in transparent materials [J]. Nat Photon, 2008, 2(4): 219-225.

[6] [6] N H Rizvi. Femtosecond laser micromachining: Current status and applications [J]. Piken Review, 2003, 50: 107-112.

[7] [7] W Zhang, G Cheng, Q Feng, et al.. Femtosecond laser machining characteristics in a single-crystal superalloy [J]. Rare Metals, 2011, 30(1): 639-642.

[8] [8] S Ma, J P McDonald, B Tryon, et al.. Femtosecond laser ablation regimes in a single-crystal superalloy [J]. Metallurgical and Materials Transactions A, 2007, 38A(13): 2349-2357.

[9] [9] N Semaltianos, W Perrie, P French, et al.. Femtosecond laser ablation characteristics of nickel-based superalloy C263 [J]. Appl Phys A, 2009, 94(4): 999-1009.

[10] [10] W Zhang, G Cheng, Q Feng, et al.. Abrupt transition from wavelength structure to subwavelength structure in a single-crystal superalloy induced by femtosecond laser [J]. Applied Surface Science, 2011, 257(9): 4321-4324.

[11] [11] W Zhang, G Cheng, Q Feng. Unclassical ripple patterns in single-crystal silicon produced by femtosecond laser irradiation [J]. Applied Surface Science, 2012, 263: 436-439.

[12] [12] J Bonse, P Rudolph, J Kruger, et al.. Femtosecond pulse laser processing of TiN on silicon [J]. Applied Surface Science, 2000, 154-155: 659-663.

[13] [13] Luo Xinmin, Han Guangtian, Yang Kun, et al.. Thermo-induced regression of microstructure of laser-shocked surface modification of 304 austenitic stainless steel [J]. Chinese J Lasers, 2013, 40(2): 0203006.

[14] [14] Li Dongjuan, Lin Ling, Lü Baida, et al.. Polarization-dependent optical guiding in low repetition frequency femtosecond laser photowritten type II fused silica waveguides [J]. Acta Optica Sinica, 2013, 33(5): 0532001.

[15] [15] Dai Ye, Qiu Jianrong. Research progress of single beam femtosecond laser direct writing self-organized nanogratings in fused silica [J]. Laser & Optoelectronics Progress, 2013, 50(12): 120002.

[16] [16] Chen Chao, Yang Xianhui, Wang Chuang, et al.. High-order tilted fiber Bragg gratings carved with femtosecond laser [J]. Acta Optica Sinica, 2014, 34(5): 0506001.

[17] [17] A Borowiec, H K Haugen. Femtosecond laser micromachining of grooves in indium phosphide [J]. Appl Phys A, 2004, 79(3): 521-529.

[18] [18] B N Chichkov, C Momma, S Nolte, et al.. Femtosecond, picosecond and nanosecond laser ablation of solids [J]. Appl Phys, 1996, 63(2): 109-115.

[19] [19] S Nolte, C Momma, H Jacobs, et al.. Ablation of metals by ultrashort laser pulses [J]. Physics A, 2004, 79(3): 521-529.

[20] [20] K Dou, E T Knobbe, R L Parkhill, et al.. Femtosecond study of surface structure and composition and time-resolved spectroscopy in metals [J]. Appl Phys A, 2003, 79(3): 303-307.

[21] [21] J Bonse, K W Brzezinka, A J Meixner. Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy [J]. Applied Surface Science, 2004, 221(1-4): 215-230.

[22] [22] N M Bulgakova, A V Bulgakov. Pulsed laser ablation of solids: Transition from normal vaporization to phase explosion [J]. Appl Phys A, 2001, 73(2): 199-208.