Fig. 1. Three axis IBF machine and IBF polished surface

Fig. 2. Five axis IBF machine and IBF polished surface

Fig. 3. Combined polishing method of material adding and removal

Fig. 4. Schematic of hydrodynamic effect polishing and polished surface

Fig. 5. Laser induced damage threshold of sample 1# and 2#

Fig. 6. Generalized numerical pressure distribution model and experimental verification

Fig. 7. Power spectrum density analysis of the data in three manufacture stages: initial data, smoothed data and finished data

Fig. 8. MRF removal functions in different regions

Fig. 9. Ion beam etching process

Fig. 10. Removing process of chemical defects

Fig. 11. High efficiency low damage combined machining technology of fused silica

Fig. 12. Magnetorheological finishing machines

Fig. 13. Ion beam figuring machines