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Opto-Electronic Engineering, Volume. 37, Issue 1, 19(2010)

Measurement System for 3D Profile of Micro/Nano Structures with High Resolution

XIE Yong-jun1,2,3、*, SHI Tie-lin2,3, and LIU Shi-yuan2
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    XIE Yong-jun, SHI Tie-lin, LIU Shi-yuan. Measurement System for 3D Profile of Micro/Nano Structures with High Resolution[J]. Opto-Electronic Engineering, 2010, 37(1): 19

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    Paper Information

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    Received: Jul. 13, 2009

    Accepted: --

    Published Online: Mar. 24, 2010

    The Author Email: Yong-jun XIE (xyj919@163.com)

    DOI:10.3969/j.issn.1003-501x.2010.01.04

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology