Infrared and Laser Engineering, Volume. 54, Issue 2, 20240519(2025)

CGH compensation surface testing technology for high-order SiC aspherical secondary mirror

Zhuorui TANG... Chaobin MAO, Yinghuai ZHANG, Chang FENG, Minyan QIU, Cheng HU and Xin ZHANG* |Show fewer author(s)
Author Affiliations
  • Ji Hua Laboratory, Foshan 528253, China
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    Figures & Tables(12)
    The optical path diagram of CGH compensation testing of the secondary mirror
    The optical path design diagram of CGH null compensation high-order aspheric secondary mirror
    Design residual of the main area
    Fringe diagram of the main area of CGH designed for high-order aspherical secondary mirror
    Fringe diagram of CGH alignment area of high-order aspherical secondary mirror
    Optical path diagram of the diffraction order separation of the high-order aspherical secondary mirror
    Schematic diagram of the diffraction order separation of high-order aspherical secondary mirror
    Surface map of the high-order aspherical secondary mirror interference detection results
    Surface map of transmission wave aberration detection results of CGH
    CGH substrate error Zernike fitting result
    Surface map of the high-order aspherical secondary mirror interference detection results after calibration
    • Table 1. The basic parameters of the optical path

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      Table 1. The basic parameters of the optical path

      CGH substrateDiameter: 150 mm; Thickness: 15 mm
      Interferometer parametersReference flat; L2= 50 mm
      Aperture parametersThe distance to the back surface of CGH is 76.5 mm; The aperture diameter is 1 mm
      Auxiliary alignment area (Blue)Auxiliary alignment between CGH and interferometer; Auxiliary alignment between CGH and plane mirror; The design uses diffraction order 1 diffraction light design
      Base projection area (Purple)The reference spot is projected on the inspected surface; The diffraction order is 3
      Four spot coordinates of the projectionJ(0, +47.26), Q(+47.26, 0), K(0, −47.26), A(−47.26, 0), Unit:mm
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    Zhuorui TANG, Chaobin MAO, Yinghuai ZHANG, Chang FENG, Minyan QIU, Cheng HU, Xin ZHANG. CGH compensation surface testing technology for high-order SiC aspherical secondary mirror[J]. Infrared and Laser Engineering, 2025, 54(2): 20240519

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    Paper Information

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    Received: Nov. 8, 2024

    Accepted: --

    Published Online: Mar. 14, 2025

    The Author Email: ZHANG Xin (zhangxin@jihualab.com)

    DOI:10.3788/IRLA20240519

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