Atomic layer deposition for quantum dots based devices

Binze Zhou; Mengjia Liu; Yanwei Wen; Yun Li; Rong Chen

doi:10.29026/oea.2020.190043

Opto-Electronic Advances, Volume. 3, Issue 9, 190043-1(2020)

Atomic layer deposition for quantum dots based devices

Binze Zhou1... Mengjia Liu1, Yanwei Wen2, Yun Li1 and Rong Chen1,* |Show fewer author(s)

¹State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China

²State Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China

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Binze Zhou, Mengjia Liu, Yanwei Wen, Yun Li, Rong Chen. Atomic layer deposition for quantum dots based devices[J]. Opto-Electronic Advances, 2020, 3(9): 190043-1

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Paper Information

Category: Review

Received: Dec. 1, 2019

Accepted: Jan. 28, 2020

Published Online: Jan. 8, 2021

The Author Email: Chen Rong (rongchen@mail.hust.edu.cn)

DOI:10.29026/oea.2020.190043

Topics

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