Infrared and Laser Engineering, Volume. 49, Issue S1, 20200064(2020)

Study on stability of Ta2O5/Al2O3 laser gyro mirrors exposed in plasma

Li Qiantao*... Li Ding, Wang Chan, Xiong Changxin and Yang Changcheng |Show fewer author(s)
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    References(8)

    [2] [2] Cole, B E. UV and plasma stable high-reflectance multilayer dielectric mirror: EP, 0372438A2[P]. 1989.

    [4] [4] Hyun Ju Cho, Young Zip Jeon. Design and fabrication of super mirrors on the Zerodur substrate[C]//Proc of SPIE, 2010, 7786: 778611.

    [5] [5] Lu S, Sun M J, Stewart A F, et al. Ultraviolet resistive coated mirror and method of fabrication: US, 5513039[P]. 1996.

    [7] [7] Robertson J. Diamond-like amorphous carbon[J]. MaterSci and Eng R, 2002, 37: 129-281.

    [8] [8] Gutierrez G, Taga A, Johansson B, et al. Theoretical structure determination of γ-Al2O3[J]. Physical Review B, 2002, 65: 201-204.

    [9] [9] Thielsch R, Gatto A, Heber J, et al. A comparative study of the UV optical and structural prperties of SiO2, Al2O3, and HfO2 single layers deposited by reactive evaporation, ion-assisted deposition and plasma ion beam[J]. Thin Solid Films, 2002, 410(1-2): 86-93.

    [10] [10] Nakamnra R, Ishimaru M, Yasuda H. Automic rearrangements in amorphous Al2O3 under electron-beam irradiation[J]. Journal of Applied Physics, 2013, 113(6): 064312.

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    Li Qiantao, Li Ding, Wang Chan, Xiong Changxin, Yang Changcheng. Study on stability of Ta2O5/Al2O3 laser gyro mirrors exposed in plasma[J]. Infrared and Laser Engineering, 2020, 49(S1): 20200064

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    Paper Information

    Category: 光电测量

    Received: Apr. 1, 2020

    Accepted: May. 9, 2020

    Published Online: Feb. 5, 2021

    The Author Email: Qiantao Li (liqiantao@hotmail.com)

    DOI:10.3788/irla20200064

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