Infrared and Laser Engineering, Volume. 49, Issue S1, 20200064(2020)

Study on stability of Ta2O5/Al2O3 laser gyro mirrors exposed in plasma

Li Qiantao*, Li Ding, Wang Chan, Xiong Changxin, and Yang Changcheng
Author Affiliations
  • [in Chinese]
  • show less

    Ta2O5/Al2O3 laser gyro mirrors have been exposed in oxygen, air, argon and neon plasma respectively. Plasma was generated by capacity coupling Radio Frequency(RF) discharge technology. The effect of plasma pressure, plasma exposing time and plasma type on optical loss of Ta2O5/Al2O3 laser gyro mirrors was studied. The phenomenon and mechanism, for the optical loss change of Ta2O5/Al2O3 laser gyro mirrors was analyzed and discussed, by using comparing experiments, Energy Disperse Spectroscopy(EDS) and X-ray photo-electron spectroscopy(XPS). Ta2O5/Al2O3 laser gyro mirrors exposed in oxygen showed biggest total loss, which arrived 15 ppm(1 ppm=1×10-6). The value was 2 to 4 times of Ta2O5/Al2O3 laser gyro mirrors exposing in air, Ne and Ar plasma. The total loss changing was caused by the absorption of outermost 2LAl2O3 layer in Ta2O5/Al2O3 laser gyro mirrors. When Ta2O5/Al2O3 laser gyro mirrors exposing O2 plasma and Ar plasma alternately, the partial reversible changing phenomenon of 2LAl2O3 layer′s absorption loss was found. The partial reversible changing phenomenon was discussed by XPS analyzing. The results show that the absorption loss changing is related to the exchanging of free oxygen and argon, occurred between outermost 2LAl2O3 layer and plasma. Some measures and suggestions are proposed to improve the stability of Ta2O5/Al2O3 laser gyro mirrors exposed in plasma.

    Tools

    Get Citation

    Copy Citation Text

    Li Qiantao, Li Ding, Wang Chan, Xiong Changxin, Yang Changcheng. Study on stability of Ta2O5/Al2O3 laser gyro mirrors exposed in plasma[J]. Infrared and Laser Engineering, 2020, 49(S1): 20200064

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: 光电测量

    Received: Apr. 1, 2020

    Accepted: May. 9, 2020

    Published Online: Feb. 5, 2021

    The Author Email: Qiantao Li (liqiantao@hotmail.com)

    DOI:10.3788/irla20200064

    Topics