Progress of On-chip Infrared Gas Sensing Technique（Invited）

Mingquan PI; Chuantao ZHENG; Lei LIANG; Fang SONG; Yiding WANG

doi:10.3788/gzxb20235203.0352106

Acta Photonica Sinica, Volume. 52, Issue 3, 0352106(2023)

Progress of On-chip Infrared Gas Sensing Technique（Invited）

Mingquan PI1...2, Chuantao ZHENG1,2,*, Lei LIANG3, Fang SONG1,2, and Yiding WANG12 |Show fewer author(s)

¹State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China

²Jilin Provincial Engineering Research Center of Infrared Gas Sensing Technique, Changchun 130012, China

³State Key Laboratory of Luminescence and Application, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

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Figures & Tables(10)

Fig. 1. Optical field distribution and evanescent field distribution of waveguide

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Fig. 2. Spectroscopy response of different on-chip sensing techniques

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Fig. 3. Evanescent field waveguide structure

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Fig. 4. Meander waveguide and spiral waveguide

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Fig. 5. Waveguide structure with slow light effect

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Fig. 6. Non-integrated optical waveguide gas sensor

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Fig. 7. Fully integrated on-chip gas sensing platform

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Table 1. Commonly used waveguide materials and infrared optical properties

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Table 1. Commonly used waveguide materials and infrared optical properties

Material	Refractive index	Infrared transparency window
Silicon，Si	~3.4	1~8 μm
Silica，SiO₂	~1.4	1~3.6 μm
Silicon nitride，Si₃N₄	~1.9	1~7 μm
Sapphire	~1.7	1~5.5 μm
Calcium fluoride，CaF₂	~1.4	1~9 μm
Germanium，Ge	4	1.5~14.7 μm
Chalcogenide glass	2~3	1~20 μm

Table 2. Theoretical analysis results of waveguide gas sensor performance

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Table 2. Theoretical analysis results of waveguide gas sensor performance

Reference	Material	Waveguide	Wavelength/μm	Loss/（dB·cm^-1）	L/cm	ECF	Gas	LoD/ppm
40	COC	Rectangular	7.7 7.7	2.5 2.5	1.7 1.7	5% 5%	CH₄ N₂O	14.2 1.6
42	COC	Rectangular	4.3 3.31 7.66	1 1 1	4.3 4.3 4.3	8% 8% 8%	CO₂ CH₄ CH₄	0.268 1.848 0.781
61	Si Si₃N₄ SiO₂ Si Si₃N₄ SiO₂	Rectangular Rectangular Rectangular Slot Slot Slot	1.653 1.653 1.653 1.653 1.653 1.653	- - - - - -	- - - - - -	20% 39.5% 39.8% 61.6% 41.8% 42.9%	CH₄ CH₄ CH₄ CH₄ CH₄ CH₄	- - - - - -
62	SOO	Rectangular	3.39	-	-	55%	CH₄	-
60	SiGe	Rectangular	7.7	2	2.17	0.17%	CH₄	366
63	Si-SiO₂	Rectangular	4.67	-	-	53%	CO	-
64	SU-8	Rectangular	Near infrared	-	-	20%	-	-
66	NOO	Rectangular	2.71 2.76 2.896 3 3.2 3.315	2	2	<10%	H₂O CO₂ NO₂ NH₃ C₂H₂ CH₄	<200
67	COC Porous Ge COC Porous Ge	Rectangular	4.3 4.3 7.7 7.7	3 3 3 3	1.44 1.40 1.45 1.41	1% 45.3% 1% 44.7%	CO₂ CO₂ CH₄ CH₄	5.63 0.12 84.65 1.89
68	SOI SOI	Slot Rib slot	1.55 1.55	- -	- -	45% 35%	- -	- -
43	SOS	Slot	4.23	-	-	25%	CO₂	-
41	SON	Slot	3	5	0.87	43%	NH₃	5
69	InAs	Slot	7~8	-	-	-	CH₄	-
70	SOO	Slot	3.39	-	-	47%	CH₄	-
71	Si-on-CaF₂	Slot	4.47 4.6 3.67	3 3 3	1.44 1.44 1.44	68.0% 66.6% 65.4%	NH₃ CO CH₄	0.214 0.436 36
32	ChG	Suspended slot	3.291	3	1.45	85.77%	CH₄	1.70
72	SOI	Slot	1.645	1.6	3	27%	CH₄	-
73	ChG	Suspended slot	3.67	2.2	1.954	93.81%	CH₄	18.17
74	NOO	Slot	1.65 1.85 1.95 2	2	2	~18.5% ~23% ~24.5% ~24.5%	CH₄ H₂O NH₃ CO₂	262 94.3 136 437
75	Ge-on-CaF₂	Slot	3.31	3	0.86	22%	CH₄	-
37	ChG-on-CaF₂	Slot racetrack resonator	3.291	3	0.094	44.63%	CH₄	3.87
76	SOI	Slot photonic crystal	1.53	-	0.03	-	C₂H₂	3.15
36	SOI	Subwavelength grating	1.651	3	1.44	-	CH₄	2.8
79	SOI	Slot subwavelength grating	1.651	3	1.45	51.8%	CH₄	0.034

Table 3. Experimental performance results of waveguide gas sensor

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Table 3. Experimental performance results of waveguide gas sensor

Reference	Material	Waveguide	Wavelength/μm	Loss/（dB·cm^-1）	L/cm	ECF	Gas	LoD（ppm）/τ（s）
80	NOO	Rectangular	0.975	-	-	10.9%	Rb	-
47	COO	Rectangular	3.31	7	2	8%	CH₄	25 000/-
52	SOI	Rectangular	1.651	2	10	25.4%	CH₄	100/60
48	COO	Rectangular	3.25~3.35	-	1	-	N-methyl aniline-based aerosol	-
81	SON	Rectangular	4.36	3.98	2	14~16%	CO₂	500
82	SON	Rectangular	4.36	-	1	19.5%	CO₂	5 000
83	SON	Rectangular	Mid-infrared	-	-	3.3%	CO₂	100 000
50	COO	Rectangular	3.31	8	1	12.5%	CH₄	10 000
23	SOI	Rectangular	1.651	-	20	-	CH₄	~100/~1
85	SOI	Rectangular	3.32 3.35	2	-	-	CH₄ Ethanol vapour	- -
86	ChG-on-MgF₂	Rectangular	4.319	5.1	1	4.6%	CO₂	3 000/0.2（WMS）
34	COO	Rectangular	3.291	3.6	2	0.5%	CH₄	6 100/50.6
87	ChG-on-MgF₂	Rectangular	3.291	1.52	1 2	7.8%	CH₄	396.7/81.8（WMS） 140.8/32.4（WMS）
88	SOI	Suspended rectangular	4.24	2.9	0.32	44%	CO₂	1 000/-
89	Ta₂O₅	Suspended rib	2.566	6.8	2	107%	C₂H₂	7/25
90	NOO	Rectangular racetrack resonator	1.42	-	-	-	Dimethylmethylphosphonate Acetone Nitrobenzene	0.002/- 140/- 1.5/-
38	SOS	Rectangular ring resonator	4.46	-	0.1	-	N₂O	5 000/-
56	NOO	Rectangular racetrack resonator	1.5~1.6	-	-	-	N-methyl aniline aerosols	-
20	SOI	Slot photonic crystal	1.66	-	0.03	-	CH₄	100/-
35	InGaAs-on-InP	Suspended photonic crystal Suspended subwavelength grating	6.15	39.1 4.1	0.1 0.3	12% 10%	NH₃	0.232/- 0.084/-
92	SOI	Suspended subwavelength grating	6.65	4.3	2.84	24.3%	Toluene vapour	75/-
93	SOI	Photonic crystal	3.4	-	0.9	17.1%	Ethanol vapour	0.250/-
94	SOI	Suspended subwavelength grating	7.33	4.7	1	113%	Acetone vapour	2.5/20 10/0.03

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Mingquan PI, Chuantao ZHENG, Lei LIANG, Fang SONG, Yiding WANG. Progress of On-chip Infrared Gas Sensing Technique（Invited）[J]. Acta Photonica Sinica, 2023, 52(3): 0352106

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