Acta Photonica Sinica, Volume. 52, Issue 3, 0352106(2023)

Progress of On-chip Infrared Gas Sensing Technique(Invited)

Mingquan PI1...2, Chuantao ZHENG1,2,*, Lei LIANG3, Fang SONG1,2, and Yiding WANG12 |Show fewer author(s)
Author Affiliations
  • 1State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
  • 2Jilin Provincial Engineering Research Center of Infrared Gas Sensing Technique, Changchun 130012, China
  • 3State Key Laboratory of Luminescence and Application, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
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    Figures & Tables(10)
    Optical field distribution and evanescent field distribution of waveguide
    Spectroscopy response of different on-chip sensing techniques
    Evanescent field waveguide structure
    Meander waveguide and spiral waveguide
    Waveguide structure with slow light effect
    Non-integrated optical waveguide gas sensor
    Fully integrated on-chip gas sensing platform
    • Table 1. Commonly used waveguide materials and infrared optical properties

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      Table 1. Commonly used waveguide materials and infrared optical properties

      MaterialRefractive indexInfrared transparency window
      Silicon,Si~3.41~8 μm
      Silica,SiO2~1.41~3.6 μm
      Silicon nitride,Si3N4~1.91~7 μm
      Sapphire~1.71~5.5 μm
      Calcium fluoride,CaF2~1.41~9 μm
      Germanium,Ge41.5~14.7 μm
      Chalcogenide glass2~31~20 μm
    • Table 2. Theoretical analysis results of waveguide gas sensor performance

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      Table 2. Theoretical analysis results of waveguide gas sensor performance

      ReferenceMaterialWaveguideWavelength/μmLoss/(dB·cm-1L/cmECFGasLoD/ppm
      40COCRectangular

      7.7

      7.7

      2.5

      2.5

      1.7

      1.7

      5%

      5%

      CH4

      N2O

      14.2

      1.6

      42COCRectangular

      4.3

      3.31

      7.66

      1

      1

      1

      4.3

      4.3

      4.3

      8%

      8%

      8%

      CO2

      CH4

      CH4

      0.268

      1.848

      0.781

      61

      Si

      Si3N4

      SiO2

      Si

      Si3N4

      SiO2

      Rectangular

      Rectangular

      Rectangular

      Slot

      Slot

      Slot

      1.653

      1.653

      1.653

      1.653

      1.653

      1.653

      -

      -

      -

      -

      -

      -

      -

      -

      -

      -

      -

      -

      20%

      39.5%

      39.8%

      61.6%

      41.8%

      42.9%

      CH4

      CH4

      CH4

      CH4

      CH4

      CH4

      -

      -

      -

      -

      -

      -

      62SOORectangular3.39--55%CH4-
      60SiGeRectangular7.722.170.17%CH4366
      63Si-SiO2Rectangular4.67--53%CO-
      64SU-8RectangularNear infrared--20%--
      66NOORectangular

      2.71

      2.76

      2.896

      3

      3.2

      3.315

      22<10%

      H2O

      CO2

      NO2

      NH3

      C2H2

      CH4

      <200
      67

      COC

      Porous Ge

      COC

      Porous Ge

      Rectangular

      4.3

      4.3

      7.7

      7.7

      3

      3

      3

      3

      1.44

      1.40

      1.45

      1.41

      1%

      45.3%

      1%

      44.7%

      CO2

      CO2

      CH4

      CH4

      5.63

      0.12

      84.65

      1.89

      68

      SOI

      SOI

      Slot

      Rib slot

      1.55

      1.55

      -

      -

      -

      -

      45%

      35%

      -

      -

      -

      -

      43SOSSlot4.23--25%CO2-
      41SONSlot350.8743%NH35
      69InAsSlot7~8---CH4-
      70SOOSlot3.39--47%CH4-
      71Si-on-CaF2Slot

      4.47

      4.6

      3.67

      3

      3

      3

      1.44

      1.44

      1.44

      68.0%

      66.6%

      65.4%

      NH3

      CO

      CH4

      0.214

      0.436

      36

      32ChGSuspended slot3.29131.4585.77%CH41.70
      72SOISlot1.6451.6327%CH4-
      73ChGSuspended slot3.672.21.95493.81%CH418.17
      74NOOSlot

      1.65

      1.85

      1.95

      2

      22

      ~18.5%

      ~23%

      ~24.5%

      ~24.5%

      CH4

      H2O

      NH3

      CO2

      262

      94.3

      136

      437

      75Ge-on-CaF2Slot3.3130.8622%CH4-
      37ChG-on-CaF2Slot racetrack resonator3.29130.09444.63%CH43.87
      76SOISlot photonic crystal1.53-0.03-C2H23.15
      36SOISubwavelength grating1.65131.44-CH42.8
      79SOISlot subwavelength grating1.65131.4551.8%CH40.034
    • Table 3. Experimental performance results of waveguide gas sensor

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      Table 3. Experimental performance results of waveguide gas sensor

      ReferenceMaterialWaveguideWavelength/μmLoss/(dB·cm-1L/cmECFGasLoD(ppm)/τ(s)
      80NOORectangular0.975--10.9%Rb-
      47COORectangular3.31728%CH425 000/-
      52SOIRectangular1.65121025.4%CH4100/60
      48COORectangular3.25~3.35-1-N-methyl aniline-based aerosol-
      81SONRectangular4.363.98214~16%CO2500
      82SONRectangular4.36-119.5%CO25 000
      83SONRectangularMid-infrared--3.3%CO2100 000
      50COORectangular3.318112.5%CH410 000
      23SOIRectangular1.651-20-CH4~100/~1
      85SOIRectangular

      3.32

      3.35

      2--

      CH4

      Ethanol vapour

      -

      -

      86ChG-on-MgF2Rectangular4.3195.114.6%CO23 000/0.2(WMS)
      34COORectangular3.2913.620.5%CH46 100/50.6
      87ChG-on-MgF2Rectangular3.2911.52

      1

      2

      7.8%CH4

      396.7/81.8(WMS)

      140.8/32.4(WMS)

      88SOISuspended rectangular4.242.90.3244%CO21 000/-
      89Ta2O5Suspended rib2.5666.82107%C2H27/25
      90NOORectangular racetrack resonator1.42---

      Dimethylmethylphosphonate

      Acetone

      Nitrobenzene

      0.002/-

      140/-

      1.5/-

      38SOSRectangular ring resonator4.46-0.1-N2O5 000/-
      56NOORectangular racetrack resonator1.5~1.6---N-methyl aniline aerosols-
      20SOISlot photonic crystal1.66-0.03-CH4100/-
      35InGaAs-on-InP

      Suspended photonic crystal

      Suspended subwavelength grating

      6.15

      39.1

      4.1

      0.1

      0.3

      12%

      10%

      NH3

      0.232/-

      0.084/-

      92SOISuspended subwavelength grating6.654.32.8424.3%Toluene vapour75/-
      93SOIPhotonic crystal3.4-0.917.1%Ethanol vapour0.250/-
      94SOISuspended subwavelength grating7.334.71113%Acetone vapour

      2.5/20

      10/0.03

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    Mingquan PI, Chuantao ZHENG, Lei LIANG, Fang SONG, Yiding WANG. Progress of On-chip Infrared Gas Sensing Technique(Invited)[J]. Acta Photonica Sinica, 2023, 52(3): 0352106

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    Paper Information

    Category: Special Issue for Frontiers and Techniques of Laser Spectroscopy

    Received: Sep. 29, 2022

    Accepted: Nov. 8, 2022

    Published Online: Jun. 21, 2023

    The Author Email: ZHENG Chuantao (zhengchuantao@jlu.edu.cn)

    DOI:10.3788/gzxb20235203.0352106

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