Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Acta Optica Sinica, Volume. 39, Issue 6, 0623002(2019)

Surface Reconstruction of Large Aperture Plane Optical Components Based on Method of Relative Angle Difference

Ling Wu1、*, Niannian Chen1, Yong Fan1, and Yidong Ye2
Author Affiliations
  • 1 School of Computer Science and Technology, Southwest University of Science and Technology, Mianyang, Sichuan 621010, China
  • 2 Institute of Applied Electronics, Chinese Academy of Engineering Physics, Mianyang, Sichuan 621900, China
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (12)
    Equations (0)
    References (26)
    Cited By (1)
    Tools
    Paper Information
    Topics
    Figures & Tables(12)
    Principle of topography measurement system with relative angle difference. (a) Top view of measurement system; (b) diagram of catwalk measurement

    Fig. 1. Principle of topography measurement system with relative angle difference. (a) Top view of measurement system; (b) diagram of catwalk measurement

    Download full size
    Laser spot array obtained by CCD

    Fig. 2. Laser spot array obtained by CCD

    Download full size
    Schematic for scanning process on measured surface

    Fig. 3. Schematic for scanning process on measured surface

    Download full size
    Reconstruction results with Gaussian noise (σ=0.2″). (a) Simulated surface to be tested; (b) reconstruction with CuRe method; (c) reconstruction with Zernike wavefront

    Fig. 4. Reconstruction results with Gaussian noise (σ=0.2″). (a) Simulated surface to be tested; (b) reconstruction with CuRe method; (c) reconstruction with Zernike wavefront

    Download full size
    Two different curved surfaces for simulation. (a) Z1; (b) Z2

    Fig. 5. Two different curved surfaces for simulation. (a) Z1; (b) Z2

    Download full size
    Comparison of reconstructed surface Z1 and residual errors with Gaussian noise (σ=0.2″). (a) Reconstruction result with proposed method; (b) reconstruction result with Zernike wavefront method; (c) reconstruction result with SLI method; (d) reconstructed residual error of proposed method; (e) reconstructed residual error of Zernike wavefront method; (f) reconstructed residual error of SLI method

    Fig. 6. Comparison of reconstructed surface Z1 and residual errors with Gaussian noise (σ=0.2″). (a) Reconstruction result with proposed method; (b) reconstruction result with Zernike wavefront method; (c) reconstruction result with SLI method; (d) reconstructed residual error of proposed method; (e) reconstructed residual error of Zernike wavefront method; (f) reconstructed residual error of SLI method

    Download full size
    Comparison of reconstructed surface Z2 and residual errors with Gaussian noise (σ=0.2″). (a) Reconstruction result with proposed method; (b) reconstruction result with Zernike wavefront method; (c) reconstruction result with SLI method; (d) residual error of proposed method; (e) residual error of Zernike wavefront method; (f) residual error of SLI method

    Fig. 7. Comparison of reconstructed surface Z2 and residual errors with Gaussian noise (σ=0.2″). (a) Reconstruction result with proposed method; (b) reconstruction result with Zernike wavefront method; (c) reconstruction result with SLI method; (d) residual error of proposed method; (e) residual error of Zernike wavefront method; (f) residual error of SLI method

    Download full size
    Reconstruction error statistics at different noise levels (σ=0-1 μrad). (a) 200 mm×200 mm, 17×17 sampling points; (b) 200 mm×200 mm, 34×34 sampling points; (c) 400 mm×400 mm, 34×34 sampling points

    Fig. 8. Reconstruction error statistics at different noise levels (σ=0-1 μrad). (a) 200 mm×200 mm, 17×17 sampling points; (b) 200 mm×200 mm, 34×34 sampling points; (c) 400 mm×400 mm, 34×34 sampling points

    Download full size
    Four repeated test results for small aperture optical component. (a) Topography measured by interferometer; (b)-(e) reconstruction results of proposed method; (f)-(i) reconstruction results with Zernike wavefront method

    Fig. 9. Four repeated test results for small aperture optical component. (a) Topography measured by interferometer; (b)-(e) reconstruction results of proposed method; (f)-(i) reconstruction results with Zernike wavefront method

    Download full size
    Two repeated test results for large aperture optical component. (a)(d) Topographies measured by interferometer; (b)(e) reconstruction results of proposed method; (c)(f) reconstruction results with Zernike wavefront method

    Fig. 10. Two repeated test results for large aperture optical component. (a)(d) Topographies measured by interferometer; (b)(e) reconstruction results of proposed method; (c)(f) reconstruction results with Zernike wavefront method

    Download full size
    Comparison of corresponding rows between reconstruction results of proposed method and topographies measured by interferometer. (a) y=75 mm; (b) y=175 mm

    Fig. 11. Comparison of corresponding rows between reconstruction results of proposed method and topographies measured by interferometer. (a) y=75 mm; (b) y=175 mm

    Download full size

    • Table 1. RMSE statistics of repeated test for two different mirrors

      View table

      Table 1. RMSE statistics of repeated test for two different mirrors

      AlgorithmSmall aperture mirror (RMSE) /μmLarge aperture mirror (RMSE) /μm
      Test 1Test 2Test 3Test 4Test 1Test 2
      Zernike wavefront0.57330.49150.50720.73050.94360.0793
      Proposed0.06380.07110.06740.06440.03510.0246
    Tools

    Get Citation

    Copy Citation Text

    Ling Wu, Niannian Chen, Yong Fan, Yidong Ye. Surface Reconstruction of Large Aperture Plane Optical Components Based on Method of Relative Angle Difference[J]. Acta Optica Sinica, 2019, 39(6): 0623002

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Optical Devices

    Received: Jan. 2, 2019

    Accepted: Mar. 4, 2019

    Published Online: Jun. 17, 2019

    The Author Email: Wu Ling (wuling751@126.com)

    DOI:10.3788/AOS201939.0623002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology