Opto-Electronic Engineering, Volume. 47, Issue 6, 190387(2020)

DMD maskless lithography stitching error correction based on motion compensation

Jiang Xu*... Yang Xu, Liu Hong, Hu Jun and Wang Yingzhi |Show fewer author(s)
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    Jiang Xu, Yang Xu, Liu Hong, Hu Jun, Wang Yingzhi. DMD maskless lithography stitching error correction based on motion compensation[J]. Opto-Electronic Engineering, 2020, 47(6): 190387

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    Paper Information

    Category: Article

    Received: Jul. 5, 2019

    Accepted: --

    Published Online: Oct. 27, 2020

    The Author Email: Xu Jiang (273944219@qq.com)

    DOI:10.12086/oee.2020.190387

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